Adaptive control of electrostatic microactuators with bidirectional drive

IEEE Transactions on Control Systems Technology

Volumn 17, Issue 2, 2009, Pages 340-352

  Tee, Keng Peng ^a   Ge, Shuzhi Sam ^b   Tay, Francis Eng Hock ^b  

^a INSTITUTE FOR INFOCOMM RESEARCH   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Adaptive control; Electrostatic devices; Microactuators; Nonlinear systems; Observers

Indexed keywords

ACTUATORS; ASYMPTOTIC ANALYSIS; BACKSTEPPING; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; FEEDBACK; NONLINEAR SYSTEMS; STATE FEEDBACK;

ADAPTIVE BACKSTEPPING; ADAPTIVE CONTROL; ADAPTIVE OBSERVERS; AIR GAPS; BARRIER FUNCTIONS; BIDIRECTIONAL DRIVES; CLOSED-LOOP SIGNALS; CONTROL OBJECTIVES; ELECTROSTATIC MICROACTUATORS; EXTENSIVE SIMULATIONS; FEEDBACK FORMS; FULL-STATE FEEDBACKS; LYAPUNOV SYNTHESIS; MOVING PLATES; OBSERVERS; OUTPUT FEEDBACK DESIGNS; OUTPUT FEEDBACKS; OUTPUT-TRACKING; PLANT PARAMETERS; REFERENCE TRAJECTORIES; SINGLE DEGREE OF FREEDOMS;

ADAPTIVE CONTROL SYSTEMS;

EID: 61849092271     PISSN: 10636536     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCST.2008.2000981     Document Type: Article

References (35)

1. P. B. Chu and S. J. Pister, "Analysis of closed-loop control of parallel-plate electrostatic microgrippers," in Proc. IEEE Int. Conf. Robot. Autom., San Diego, CA, May 1994, pp. 820-825.
2. J. L. Seeger and S. B. Crary, "Stabilization of electrostatically actuated mechanical devices," in Proc. 9th Int. Conf. Solid-State Sensors Actuators (Transducers), Chicago, IL, Jun. 1997, pp. 1133-1136.
3. E. K. Chan and R. W. Dutton, "Electrostatic micromechanical actuator with extended range of travel," J. Microelectromech. Syst., vol. 9, no. 3, pp. 321-328, 2000.
4. R. Nadal-Guardia, A. Dehé, R. Aigner, and L. M. Castañer, "Current drive methods to extend the range of travel of electrostatic microactuators beyond the voltage pull-in point," J. Microelectromech. Syst., vol. 11, no. 3, pp. 255-263, 2002.
5. J. Seeger and B. Boser, "Charge control of parallel-plate, electrostatic actuators and the tip-in instability," J. Microelectromech. Syst., vol. 12, no. 5, pp. 656-671, 2003.
6. G. Zhu, J. Lévine, and L. Praly, "Improving the performance of an electrostatically actuated MEMs by nonlinear control: Some advances and comparisons," in Proc. 44th IEEE Conf. Dec. Control, Seville, Spain, Dec. 2005, pp. 7534-7539.
7. D. H. S. Maithripala, J. M. Berg, and W. P. Dayawansa, "Control of an electrostatic microelectromechanical system using static and dynamic output feedback," J. Dyn. Syst., Meas., Control, vol. 127, pp. 443-450, 2005.
8. D. H. S. Maithripala, B. D. Kawade, J. M. Berg, and W. P. Dayawansa, "A general modelling and control framework for electrostatically actuated mechanical systems," Int. J. Robust Nonlinear Control, vol. 15, pp. 839-857, 2005.
9. K. Nonaka, T. Sugimoto, J. Baillieul, and M. Horenstein, "Bi-directional extension of the travel range of electrostatic actuators by open loop periodically switched oscillatory control," in Proc. 43rd IEEE Conf. Dec. Control, Bahamas, Dec. 2004, pp. 1964-1969.
10. T. Sugimoto, K. Nonaka, and M. N. Horenstein, "Bidirectional electrostatic actuator operated with charge control," J. Microelectromech. Syst., vol. 14, no. 4, pp. 718-724, 2005.
11. B. Borovic, A. Q. Liu, D. Popa, H. Cai, and F. L. Lewis, "Open-loop versus closed-loop control of MEMs devices: Choices and issues," J. Micromech. Microeng., vol. 15, pp. 1917-1924, 2005.
12. K. S. Narendra and A. M. Annaswamy, Stable Adaptive Systems. Englewood Cliffs, NJ: Prentice-Hall, 1989.
13. J. E. Slotine and W. Li, Applied Nonlinear Control. Englewood Cliffs, NJ: Prentice-Hall, 1991.
14. P. A. Ioannou and J. Sun, Robust Adaptive Control. Englewood Cliffs, NJ: Prentice-Hall, 1995.
15. D. G. Taylor, P. V. Kokotovic, R. Marino, and I. Kanellakopoulos, "Adaptive regulation of nonlinear systems with unmodeled dynamics," IEEE Trans. Autom. Control, vol. 34, no. 4, pp. 405-412, Apr. 1989.
16. I. Kanellakopoulos, P. V. Kokotovic, and R. Marino, "An extended direct scheme for robust adaptive nonlinear control," Automatica, vol. 27, pp. 247-255, 1991.
17. S. S. Sastry and A. Isidori, "Adaptive control of linearizable systems," IEEE Trans. Autom. Control, vol. 34, no. 11, pp. 1123-1231, Nov. 1989.
18. M. Krstic, I. Kanellakopoulos, and P. V. Kokotovic, Nonlinear and Adaptive Control Design. New York: Wiley, 1995.
19. A. Shkel, R. Horowitz, A. Seshia, S. Park, and R. Howe, "Dynamics and control of micromachined gyroscopes," in Proc. Amer. Control Conf. San Diego, CA, Jun. 1999, pp. 2119-2124.
20. R. Leland, "Adaptive tuning for vibrational gyroscopes," in Proc. 40th IEEE Conf. Dec. Control, Orlando, Florida, Dec. 2001, pp. 3447-3452.
21. S. Park and R. Horowitz, "Adaptive control for the conventional mode of operation of MEMs gyroscopes," J. Microelectromech. Syst., vol. 12, no. 1, pp. 101-108, 2003.
22. D. Piyabongkarn, Y. Sun, R. Rajamani, A. Sezen, and B. J. Nelson, "Travel range extension of a MEMs electrostatic microactuator," IEEE Trans. Control Syst. Technol., vol. 13, no. 1, pp. 138-145, Jan. 2005.
23. S. S. Ge, C. C. Hang, T. H. Lee, and T. Zhang, Stable Adaptive Neural Network Control. Boston, MA: Kluwer, 2001.
24. S. S. Ge, K. P. Tee, I. Vahhi, and E. H. Tay, "Tracking and vibration control of flexible robots using shape memory alloys," IEEE/ASME Trans. Mechatronics, vol. 11, no. 6, pp. 690-698, Dec. 2006.
25. K. P. Tee, S. S. Ge, and E. H. Tay, "Adaptive control of a class of uncertain electrostatic microactuators," in Proc. Amer. Control Conf., NY, Jul. 2007, pp. 3186-3191.
26. K. B. Ngo, R. Mahony, and Z. P. Jiang, "Integrator backstepping using barrier functions for systems with multiple state constraints," in Proc. 44th IEEE Conf. Dec. Control, Seville, Spain, Dec. 2005, pp. 8306-8312.
27. J. J. Blech, "On isothermal squeeze films," J. Lubrication Technol. vol. 105, pp. 615-620, 1983.
28. M. Andrews, I. Harris, and G. Turner, "A comparison of squeeze-film theory with measurements on a microstructure," Sensors Actuators A vol. 36, pp. 79-87, 1993.
29. W. Kuehnel, "Modelling of the mechanical behaviour of a differential capacitor acceleration sensor," Sensors Actuators A, vol. 48, pp. 101-108, 1995.
30. S. Vemuri, G. Fedder, and T. Mukherjee, "Low-order squeeze film model for simulation of MEMS devices," in Proc. 3rd Int. Conf. Model. Simulation Microsyst., San Diego, CA, Mar. 2000, pp. 205-208.
31. J. B. Lee and C. Goldsmith, "Numerical simulations of novel constant- charge biasing method for capacitive RF MEMS switch," in Proc. NanoTech Conf.: Model. Simulation Microsyst., San Francisco, CA, Feb. 2003, pp. 396-399.
32. J. D. Williams, R. Yang, and W. Wang, "Numerical simulation and test of a UV-LIGA-fabricated electromagnetic micro-relay for power applications," Sensors Actuators A, vol. 120, pp. 154-162, 2005.
33. S. D. Senturia, Microsystem Design. Norwell, MA: Kluwer, 2001.
34. M. Hoffmann, D. Nüsse, and E. Voges, "Electrostatic parallel-plate actuators with large deflections for use in optical moving-fibre switches," J. Micromech. Microeng., vol. 11, pp. 323-328, 2001.
35. D. A. Horsley, N. Wongkomet, R. Horowitz, and A. P. Pisano, "Precision positioning using a microfabricated electrostatic actuator," IEEE Trans. Magn., vol. 35, no. 2, pp. 993-999, Feb. 1999.