Numerical simulation and test of a UV-LIGA-fabricated electromagnetic micro-relay for power applications

Sensors and Actuators, A: Physical

Volumn 120, Issue 1, 2005, Pages 154-162

  Williams, John D ^a   Yang, Ren ^a   Wang, Wanjun ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

Electromagnetic; Micro power relay; Microfabricated magnetic core; Ni Fe spring; Solenoid; SU 8; UV LIGA

Indexed keywords

COMPUTER SIMULATION; ELECTROMAGNETISM; MAGNETIC CORES; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MOSFET DEVICES; NATURAL FREQUENCIES; NETWORKS (CIRCUITS); SOLENOIDS;

ELECTROMAGNETIC; MICRO POWER RELAY; MICROFABRICATED MAGNETIC CORES; NI-FE SPRINGS; SU-8; UV-LIGA;

ELECTRIC RELAYS;

EID: 17444378579     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.10.034     Document Type: Article

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