A new process for fabricating tip-shaped polymer microstructure array with patterned metallic coatings

Sensors and Actuators, A: Physical

Volumn 150, Issue 2, 2009, Pages 296-301

  Zhou, Hongbo ^a,b   Li, Gang ^a,b   Sun, Xiaona ^a,b   Zhu, Zhuanghui ^a,b   Xu, Baojian ^a   Jin, Qinghui ^a   Zhao, Jianlong ^a   Ren, Qiu Shi ^c  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Anodic metal etching; Polymer microstructure; Sacrificial layer; Three dimensional structure

Indexed keywords

ETCHING; FABRICATION; LIGHT MEASUREMENT; METAL MOLDING; METALS; MICROELECTRODES; MICROSTRUCTURE; POLYIMIDES; POLYMERS; SCANNING ELECTRON MICROSCOPY; THREE DIMENSIONAL;

ANODIC METAL ETCHING; COMPARATIVE STUDIES; METAL LAYERS; METAL-COATED; METALLIC COATINGS; MICRO MOLDINGS; MICRO-FABRICATION TECHNOLOGIES; MICROELECTRODES ARRAYS; NEURAL STIMULATIONS; NEW PROCESS; POLYMER MICROSTRUCTURE; SACRIFICIAL LAYER; SEM; SEM IMAGES; THREE DIMENSIONAL (3D) MICROSTRUCTURES; THREE-DIMENSIONAL STRUCTURE;

PLASTIC COATINGS;

EID: 61449227229     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.01.009     Document Type: Article

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