The formation of sharp AFM tips by single step etching

Journal of Micromechanics and Microengineering

Volumn 16, Issue 7, 2006, Pages 1298-1300

  Neuzil, P ^a   Nagarajan, R ^b  

^a INSTITUTE OF BIOENGINEERING AND NANOTECHNOLOGY   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ATOMIC FORCE MICROSCOPY; HINGES; MATERIALS SCIENCE; NITRIDES; OXIDATION; SILICA;

PHOTORESIST REMOVAL;

REACTIVE ION ETCHING;

EID: 33745111849     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/7/025     Document Type: Article

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