Fabrication of sharp tetrahedral probes with platinum coating

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 7 B, 2002, Pages 4928-4931

  Kitazawa, Masashi ^a   Toda, Akitoshi ^a  

^a OLYMPUS CORPORATION   (Japan)

Author keywords

Cantilever; Conducting; Film stress; Platinum; Probe; SPM; Sputtering; Tetrahedral tip; Tip apex

Indexed keywords

DEFORMATION; EVAPORATION; LIGHT REFLECTION; METALLIC FILMS; NATURAL FREQUENCIES; OPTICAL MICROSCOPY; PLATINUM; PROBES; SPUTTERING; STRESS ANALYSIS;

SCANNING PROBE MICROSCOY (SPM);

NANOTECHNOLOGY;

EID: 0036657130     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.4928     Document Type: Conference Paper

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