Mass-producible monolithic silicon probes for scanning probe microscopes

Sensors and Actuators, A: Physical

Volumn 71, Issue 3, 1998, Pages 233-237

  Liu, Chang ^a   Gamble, Ronald ^b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b TopoMetrix Corporation   (United States)

Author keywords

Monolithic silicon probes; Oxidation sharpening; Scanning probe microscope

Indexed keywords

ETCHING; MICROSCOPES; MONOLITHIC INTEGRATED CIRCUITS; NATURAL FREQUENCIES; OXIDATION; PROBES;

MONOLITHIC SILICON PROBES; SCANNING PROBE MICROSCOPES (SPM);

SILICON SENSORS;

EID: 0032306316     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00182-4     Document Type: Article

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