Influence of the bias voltage on the structure and mechanical performance of nanoscale multilayer CrAlYNCrN physical vapor deposition coatings

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 2, 2009, Pages 174-182

  Safran G ^a   Reinhard, C ^b   Ehiasarian, A P ^b   Barna, P B ^a   Szkely L ^a   Geszti, O ^a   Hovsepian, P Eh ^b  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b SHEFFIELD HALLAM UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BALL MILLS; BIAS VOLTAGE; CARBIDE TOOLS; CARBIDES; COATINGS; CRYSTAL STRUCTURE; EPITAXIAL GROWTH; ETCHING; FRICTION; HARDENING; MAGNETRONS; MASS SPECTROMETRY; MECHANICAL TESTING; MILLING (MACHINING); MULTILAYERS; NANOSTRUCTURED MATERIALS; STAINLESS STEEL; STEEL TESTING; STRUCTURAL ANALYSIS; SUPERLATTICES; TEXTURES; TRANSMISSION ELECTRON MICROSCOPY;

304 STAINLESS STEELS; CEMENTED CARBIDE SUBSTRATES; CEMENTED CARBIDES; CHEMICAL COMPOSITIONS; COATING STRUCTURES; COLUMNAR GROWTHS; CROSS-SECTIONAL TRANSMISSION ELECTRON MICROSCOPIES; DEPOSITION PARAMETERS; END MILLS; EQUIAXED STRUCTURES; FCC STRUCTURES; FRICTION COEFFICIENTS; HIGH SPEED MILLINGS; HIGH-POWER; HIGH-SPEED STEELS; LARGE CRYSTALS; LARGE SURFACE AREAS; LIFE-TIME; LOW BIAS VOLTAGES; MECHANICAL PERFORMANCE; NANOSCALE MULTILAYERS; NEUTRAL MASS; PHYSICAL VAPOR DEPOSITION COATINGS; PRE TREATMENTS; SINGLE PHASE; SLIDING WEARS; SUBSTRATE CRYSTALS; SUBSTRATE TEMPERATURES; SUPERLATTICE COATINGS; TRIBOLOGICAL PROPERTIES; UNBALANCED MAGNETRON SPUTTERING; X- RAY DIFFRACTIONS;

SUBSTRATES;

EID: 61449184591     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3065675     Document Type: Article

References (24)

1. P. E. Hovsepian, C. Reinhard, and A. P. Ehiasarian, Surf. Coat. Technol. 204, 4105 (2006).
2. A. P. Ehiasarian, P. E. Hovsepian, M. Lattemann, J. Böhlmark, and U. Helmersson, in Proceedings of the 48th Annual Technical Conference, Denver, CO, USA, 23-28 August 2005 edited by Society of Vacuum Coaters (Society of Vacuum Coaters, Denver, 2005), p. 480.
3. W.-D. Munz, A. P. Ehiasarian, and P. E. Hovsepian, European Patent No. EP1260603BI, 2006.
4. A. P. Ehiasarian, J. G. Wen, and I. Petrov, J. Appl. Phys. 101, 054301 (2007).
5. R. Messier, A. P. Giri, and R. A. Roy, J. Vac. Sci. Technol. A 2, 500 (1984).
6. I. Petrov, P. Losbichler, D. Bergstrom, J. E. Greene, W.-D. Münz, T. Hurkmans, and T. Trinh, Thin Solid Films 302, 179 (1997).
7. G. B. Harris, Philos. Mag. 43, 113 (1952).
8. A. Barna, B. Ṕcz, and M. Menyhard, Ultramicroscopy 70, 161 (1998).
9. J. L. Lábár, Ultramicroscopy 103, 237 (2005).
10. W. C. Oliver and G. M. Pharr, J. Mater. Res. 7, 1564 (1992).
11. B. C. Cullity and S. R. Stock, Elements of X-ray Diffraction (Prentice-Hall, Englewood Cliffs, 2003), p. 447.
12. T. Hurkmans, D. B. Lewis, H. Paritong, J. S. Brooks, and W.-D. Münz, Surf. Coat. Technol. 114, 52 (1999).
13. J.-L. Ruan, J.-L. Huang, J. S. Chen, and D.-F. Lii, Surf. Coat. Technol. 200, 1652 (2005).
14. T. Hurkmans, D. B. Lewis, J. S. Brooks, and W.-D. Münz, Surf. Coat. Technol. 86-87, 192 (1996).
15. A. Sugishima, H. Kajioka, and Y. Makino, Surf. Coat. Technol. 97, 590 (1997).
16. D. B. Lewis, Q. Luo, P. Eh. Hovsepian, and W.-D. Münz, Surf. Coat. Technol. 184, 225 (2004).
17. A. P. Ehiasarian, W.-D. Münz, L. Hultman, U. Helmersson, and I. Petrov, Surf. Coat. Technol. 163-164, 267 (2003).
18. W.-D. Münz, D. B. Lewis, S. Creasey, T. Hurkmans, T. Trinh, and W. Ijzendorn, Vacuum 46, 323 (1995).
19. W. Brückner, W. Pitschke, S. Baunack, and J. Thomas, J. Mater. Res. 14, 1286 (1999).
20. S. A. Barnett and A. Mandan, Phys. World 11, 45 (1998).
21. W.-J. Chou, G.-P. Yu, and J.-H. Huang, Surf. Coat. Technol. 149, 7 (2002).
22. Z. P. Huang, Y. Sun, and T. Bell, Wear 173, 13 (1994).
23. E. J. Bienk, H. Reitz, and N. J. Mikkelsen, Surf. Coat. Technol. 76-77, 475 (1995).
24. C. Mendibide, J. Fontaine, P. Steyer, and C. Esnouf, Tribol. Lett. 17, 779 (2004).