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Surface and Coatings Technology

Volumn 184, Issue 2-3, 2004, Pages 225-232

Interrelationship between atomic species, bias voltage, texture and microstructure of nano-scale multilayers

(4) Lewis, D B a Luo, Q a Hovsepian, P Eh a Munz W D a

a SHEFFIELD HALLAM UNIVERSITY (United Kingdom)

Author keywords

Atomic species; Magnetron sputtering; Residual stress; Structure evolution; Texture

Indexed keywords

COATINGS; MICROSTRUCTURE; NUCLEATION; STAINLESS STEEL; TITANIUM COMPOUNDS;

BIAS VOLTAGE; HEAVY ELEMENTS; LATTICE GROWTH; MULTILAYER COATINGS; TERNARY NITRIDES;

NITRIDES;

MICROSTRUCTURE; NANOTECHNOLOGY; SPUTTERING; TEXTURE;

EID: 2642570216 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2003.11.005 Document Type: Article

Times cited : (37)

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