Hydrogen mediated transport of Sn to Ru film surface

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 2, 2009, Pages 306-314

  Faradzhev, Nadir ^a,c   Sidorkin, Vadim ^b  

^a RUTGERS UNIVERSITY   (United States)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC HYDROGENS; AVERAGE SIZES; DEFECT SITES; ION SCATTERINGS; LOW ENERGY ION SCATTERING SPECTROSCOPIES; OXIDATION STATE; POLY-CRYSTALLINE; RANDOMLY DISTRIBUTED; ROOM TEMPERATURES; RU FILMS; STANNANE; SURFACE AREAS; THREE-DIMENSIONAL ISLANDS; VOLMER-WEBER GROWTH MODES; WETTING LAYERS;

ELECTRON ENERGY LOSS SPECTROSCOPY; GAS ADSORPTION; GRAIN BOUNDARIES; HYDROGEN; OXIDATION; PHOTOELECTRON SPECTROSCOPY; PHOTOIONIZATION; PHOTONS; PLASMA INTERACTIONS; SCANNING ELECTRON MICROSCOPY; THREE DIMENSIONAL;

TIN;

EID: 61449121106     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3081968     Document Type: Article

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