Influence of deposition parameter on chemical structure and moisture resistant properties for SiNx films deposited by DC pulse magnetron sputtering

Wuli Xuebao/Acta Physica Sinica

Volumn 58, Issue 1, 2009, Pages 432-437

  Ding, Wan Yu ^a   Wang, Hua Lin ^a   Miao, Zhuang ^b   Zhang, Jun Ji ^a   Chai, Wei Ping ^a  

^a DALIAN JIAOTONG UNIVERSITY   (China)

^b National Center For Packaging Product Quality Supervision And Inspection   (China)

Author keywords

Magnetron sputtering; Microstructure; SiNx; Water vapor permeability

Indexed keywords

EID: 60649111687     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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