Novel structural Ti/Al-based ohmic contacts on AlGaN/GaN heterostructures

International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT

Volumn , Issue , 2008, Pages 1110-1113

  Dong, Zhihua ^a   Wang, Jinyan ^a   Yu, Min ^a   Hao, Yilong ^a   Wen, C P ^a   Wang, Yangyuan ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

AlGaN GaN; Ohmic contacts; Surface morphology

Indexed keywords

ALGAN/GAN; ALGAN/GAN HETEROSTRUCTURES; HIGH FREQUENCIES; HIGH-POWER; METAL STRUCTURES; MULTI LAYERS; NOVEL STRUCTURES; SEM; SPECIFIC CONTACT RESISTANCES; THERMAL STABILITIES;

CRYSTALS; ELECTRIC CONTACTORS; GALLIUM ALLOYS; GALLIUM NITRIDE; INTEGRATED CIRCUITS; OHMIC CONTACTS; SEMICONDUCTING GALLIUM; STRUCTURAL METALS;

SURFACE MORPHOLOGY;

EID: 60649100078     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSICT.2008.4734731     Document Type: Conference Paper

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