EXAFS investigation of the thermally induced structuring of titanium-doped amorphous carbon films

Materials Science and Engineering C

Volumn 27, Issue 5-8 SPEC. ISS., 2007, Pages 1423-1427

  Adelhelm, C ^a   Balden, M ^a   Sikora, M ^b,c  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^b EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^c AGH UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Poland)

Author keywords

EXAFS; Metal doped amorphous carbon films; Microstructure; Nanostructure

Indexed keywords

AMORPHOUS CARBON; EXTENDED X RAY ABSORPTION FINE STRUCTURE SPECTROSCOPY; MAGNETRON SPUTTERING; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; TITANIUM;

AS-DEPOSITED LAYERS; DUAL-SOURCE MAGNETRON SPUTTER; METAL-DOPED AMORPHOUS CARBON FILMS;

AMORPHOUS FILMS;

EID: 34547691221     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msec.2006.06.012     Document Type: Article

References (19)

1. Nilsson D., Svahn F., Wiklund U., and Hogmark S. Wear 254 (2003) 1084
2. Voevodin A.A., O'Neill J.P., and Zabinski J.S. Thin Solid Films 342 (1999) 194
3. Yang S., Li X., Renevier N.M., and Teer D.G. Surface and Coatings Technology 142 (2001) 85
4. Huang Q.F., Yoon S.F., Rusli, Yang H., Gan B., Chew K., and Ahn J. Journal of Applied Physics 88 (2000) 4191
5. You T., Niwa O., Horiuchi T., Tomita M., Iwasaki Y., Ueno Y., and Hirono S. Chemistry of Materials 14 (2002) 4796
6. Aymar R. Journal of Nuclear Materials 307 (2002) 1
7. Balden M., Garcia-Rosales C., Behrisch R., Roth J., Paz P., and Etxeberria J. Journal of Nuclear Materials 290 (2001) 52
8. Pardo E.d.J., Balden M., Cieciwa B., Garcia-Rosales C., and Roth J. Physica Scripta T111 (2004) 62
9. Balden M., Pardo E.d.J., Quintana I., Cieciwa B., and Roth J. Journal of Nuclear Materials 337-339 (2005) 980
10. Stuber M., Leiste H., Ulrich S., Holleck H., and Schild D. Surface and Coatings Technology 150 (2002) 218
11. Feng B., Cao D.M., Meng W.J., Xu J., Tittsworth R.C., Rehn L.E., Baldo P.M., and Doll G.L. Surface and Coatings Technology 148 (2001) 153
12. Meng W.J., Tittsworth R.C., Jiang J.C., Feng B., Cao D.M., Winkler K., and Palshin V. Journal of Applied Physics 88 (2000) 2415
13. Balden M., Cieciwa B.T., Quintana I., de Juan Pardo E., Koch F., Sikora M., and Dubiel B. Surface and Coatings Technology 200 (2005) 413
14. Mayer M. SIMNRA User's Guide, Tech. Rep. IPP 9/113 (1997), Max-Planck-Institut für Plasmaphysik, Garching
15. B.D. Cullity, Addison-Wesley (1967).
16. Ravel B., and Newville M. Journal of Synchrotron Radiation 12 (2005) 537
17. Ankudinov A.L., Ravel B., Rehr J.J., and Conradson S.D. Physical Review. B 58 (1998) 7565
18. Ravel B. Journal of Synchrotron Radiation 8 (2001) 314
19. Koningsberger D.C., and Prins R. X-ray Absorption. Principles, Applications, Techniques of EXAFS, SEXAFS and XANES (1988), John Wiley & Sons, New York