Characterization and erosion of metal-containing carbon films

Physica Scripta T

Volumn T128, Issue , 2007, Pages 121-126

  Balden, M ^a   Adelhelm, C ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLITES; DOPING (ADDITIVES); FILM THICKNESS; MAGNETRON SPUTTERING; MASS SPECTROMETRY;

CARBIDE CYRSTALLITES; EROSION YIELD; METAL-CONTAINING CARBON FILMS;

CARBON FILMS;

EID: 42249109550     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1088/0031-8949/2007/T128/024     Document Type: Conference Paper

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