Gas phase studies of new copper(I) carboxylates compounds with vinylsilanes and their application in Chemical Vapor Deposition (CVD)

Polyhedron

Volumn 28, Issue 4, 2009, Pages 721-728

  Szymańska, Iwona B ^a   Piszczek, Piotr ^a   Szłyk, Edward ^a  

^a NICOLAUS COPERNICUS UNIVERSITY   (Poland)

Author keywords

Copper(I); CVD; MS; Perfluorinated carboxylates; Temperature variable IR; Vinylsilane

Indexed keywords

CARBOXYLATION; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; COORDINATION REACTIONS; DECOMPOSITION; GASES; MASS SPECTROMETRY; SCANNING ELECTRON MICROSCOPY; SPECTRUM ANALYSIS; THERMOANALYSIS;

CHEMICAL VAPOUR DEPOSITION; COPPER LAYER; DOUBLE BONDS; GAS-PHASES; MS; PERFLUORINATED CARBOXYLATE; TEMPERATURE VARIABLE IR; TEMPERATURE VARIABLES; VARIABLE TEMPERATURE; VINYL SILANE;

COPPER COMPOUNDS;

EID: 60349123440     PISSN: 02775387     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.poly.2008.12.052     Document Type: Article

References (35)

1. T.T. Kodas, M.J. Hampden-Smith, in: The Chemistry of Metal CVD, VCH, Weinheim 1994, pp. 20-30, 175, 239, 242.
2. Hoshino M., Kasai K., and Komeno J. Jpn. J. Appl. Phys. 31 (1992) 4403
3. Murarka S.P. Mater. Sci. Eng. 19 (1997) 76
4. Grodzicki A., Łakomska I., Piszczek P., Szymańska I., and Szłyk E. Coord. Chem. Rev. 249 (2005) 2232
5. Kalyanaraman R., Oktyabrsky S., and Narayan J. J. Appl. Phys. 85 (1999) 6636
6. Doppelt P. Coord. Chem. Rev. 178-180 (1998) 1785
7. Norman J.A.T., Muratore B.A., Dyer P.N., Roberts D.A., Hochberg A.K., and Dubois L.H. Mater. Sci. Eng. B 17 (1993) 87
8. Hampden-Smith M.J., Kodas T.T., Paffett M.F., Farr J.D., and Shin H.K. Chem. Mater. 2 (1990) 636
9. Dupy C.G., Beach D.B., Hurst Jr.J.E., and Jasinski J.M. Chem. Mater. 1 (1989) 16
10. Blessmann D., Grafe A., Heinen R., Jansen F., Kruck Th., and Terfloth C. Mater. Sci. Eng. B 17 (1993) 104
11. Shin H.K., Chi K.M., Hampden-Smith M.J., Kodas T.T., Farr J.D., and Paffett M.F. Chem. Mater. 4 (1992) 788
12. Hampden-Smith M.J., and Kodas T.T. Chem. Vapor. Depos. 1 (1995) 8
13. Chi K.-M., and Lu Y.-H. Chem. Vapor. Depos. 7 (2001) 117
14. Maarten L.H., ter Heerdt M.L.H., van der Put P.J., and Schoonaman J. Chem. Vapor. Depos. 7 (2001) 199
15. Hong L.-S., and Jeng M.-G. Appl. Surf. Sci. 161 (2000) 149
16. Krisuik V.V., Turgambaeva A.E., and Rhee S.W. Polyhedron 23 (2004) 809
17. Norman J.A.T., Muratore B.A., Dyer P.N., Roberts D.A., and Hochberg A.K. J. Phys. IV 1 (1991) C2-271
18. ter Heerdt M.L.H., Overdijk J.J., van der Put P.J., and Schoonman J. Chem. Mater. 11 (1999) 3470
19. Jain A., Kodas T.T., Jairath R., and Hampden-Smith M.J. J. Vac. Sci. Technol. 11 (1993) 2107
20. Friese Apel., Abdul-Hak A., Schwierzi B., and Höhne U. Microelectron. Eng. 37/38 (1997) 157
21. Szłyk E., and Szymańska I. Polyhedron 18 (1999) 2941
22. Piszczek P., Grodzicki A., Richert M., and Radtke A. Mater. Sci.-Poland 23 (2005) 663
23. Szłyk E., Piszczek P., Łakomska I., Grodzicki A., Szatkowski J., and Błaszczyk T. Chem. Vapor. Depos. 6 (2000) 105
24. Szymańska I.B., Piszczek P., Bała W., Bartkiewicz K., and Szłyk E. Surf. Coat. Technol. 201 (2007) 9015
25. Piszczek P., Szymańska I., Bała W., Bartkiewicz K., Talik E., and Heiman J. Thin Solid Films 516 (2008) 3924
26. Szłyk E., Kucharek R., and Szymańska I. J. Coord. Chem. 53 (2001) 55
27. Szłyk E., Kucharek R., and Szymańska I. Pol. J. Chem. 75 (2001) 337
28. Szłyk E., Kucharek R., Szymańska I., and Pazderski L. Polyhedron 22 (2003) 3389
29. Szymańska I., Pazderski L., Kucharek R., and Szłyk E. Pol. J. Chem. 79 (2005) 1705
30. Szłyk E., Kucharek R., and Szymańska I. Mater. Sci.-Poland 21 (2003) 245
31. K. Nakamoto, in: Infrared and Raman Spectra of Inorganic and Coordination Compounds, part B, John Wiley and Sons, New York, 1997, pp. 59-62, 276-282.
32. Powder Diffraction File, Sets 4-836, Joint Committee on Diffraction Standards, 1977.
33. Szymańska I.B. Ann. Pol. Chem. Soc. (2007) 585
34. Lin D.C.K., and Westmore J.B. Can. J. Chem. 51 (1973) 2999
35. Ogura T., and Fernando Q. Inorg. Chem. 12 (1973) 2611