Improved silicon surface passivation achieved by negatively charged silicon nitride films

Applied Physics Letters

Volumn 94, Issue 6, 2009, Pages

  Weber, K J ^a   Jin, H ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; BORON NITRIDE; CONVERSION EFFICIENCY; ELECTRIC CORONA; NITRIDES; PASSIVATION; SILICON NITRIDE;

BORON DIFFUSED; CORONA DISCHARGES; EFFECTIVE-LIFETIME MEASUREMENTS; NEGATIVE CHARGES; NITRIDE LAYERS; SILICON NITRIDE FILMS; SILICON SAMPLES; SILICON SURFACES; SURFACE PASSIVATIONS; SURFACE RECOMBINATION VELOCITIES;

NONMETALS;

EID: 60349110546     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3077157     Document Type: Article

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