Hydrogen reintroduction by forming gas annealing to LPCVD silicon nitride coated structures

Journal of the Electrochemical Society

Volumn 153, Issue 8, 2006, Pages

  Jin, Hao ^a   Weber, K J ^a   Deenapanray, P N K ^a   Blakers, A W ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; COATINGS; ELECTROCHEMISTRY; HYDROGEN BONDS; OPTICAL PROPERTIES; PASSIVATION; SILICON WAFERS; THERMAL EFFECTS;

GAS ANNEALING; LOW-PRESSURE CHEMICAL-VAPOR DEPOSITED (LPCVD); NITRIDE FILM; SURFACE PASSIVATION;

SILICON NITRIDE;

EID: 33745488385     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2207058     Document Type: Article

References (28)

1. Z. Chen, A. Rohatgi, R. O. Bell, and J. P. Kalejs, Appl. Phys. Lett., 65, 2078 (1994).
2. F. Duerinckx and J. Szlufcik, Sol. Energy Mater. Sol. Cells, 72, 231 (2002).
3. F. H. P. M. Habraken, R. H. G. Tijhaar, W. F. van der Weg, A. E. T. Kuiper, and M. F. C. Willemsen, J. Appl. Phys., 59, 447 (1986).
4. H. J. Stein, P. S. Peercy, and R. J. Sokel, Thin Solid Films, 101, 291 (1983).
5. M. J. McCann, K. J. Weber, and A. W. Blakers, Prog. Photovoltaics, 13, 195 (2005).
6. M. J. McCann, K. J. Weber, and A. W. Blakers, in Proceedings of the 3rd World Conference on Photovoltaic Solar Energy Conversion, p. 771 (2003).
7. M. J. McCann, M. J. Stocks, K. J. Weber, and A. W. Blakers, in Proceedings of the 17th European Photovoltaic Solar Energy Conference, p. 1708 (2001).
8. B. Bazin, Solid-State Electron., 15, 649 (1972).
9. K. E. Bean, P. S. Gleim, R. L. Yeakley, and W. R. Runyan, J. Electrochem. Soc., 114, 733 (1967).
10. D. Teasdale, Y. Senzaki, R. Herring, G. Hoeye, L. Page, and P. Schubert, Electrochem. Solid-State Lett., 4, 11 (2001).
11. K. J. Weber, A. W. Blakers, M. J. Stocks, J. H. Babaei, V. A. Everett, A. J Neuendorf, and P. J. Verlinden, IEEE Electron Device Lett., 25, 37 (2004).
12. H. Jin, K. J. Weber, and A. W. Blakers, in Proceedings of the 17th European Photovoltaic Solar Energy Conference, p. 230 (2005).
13. J. Z. Xie, S. P. Murarka, X. S. Guo, and W. A. Lanford, J. Vac. Sci. Technol. B, 7, 150 (1988).
14. H. J. Stein, S. T. Picraux, and P. H. Holloway, IEEE Trans. Electron Devices, ED-25, 1008 (1978).
15. J. G. E. Gardeniers, H. A. C. Tilmans, and C. C. G. Visser, J. Vac. Sci. Technol. A, 14, 2879 (1996).
16. W. M. Arnoldbik, R. N. H. Linssen, F. H. P. M. Habraken, W. F. van der Weg, and A. E. T. Kuiper, Appl. Phys. Lett., 56, 2530 (1990).
17. W. M. Arnoldbik, C. H. M. Maree, A. J. H. Maas, M. J. van den Boogard, and F. H. P. M. Habraken, and A. E. Kuiper Phys. Rev. B, 48, 5444 (1993).
18. R. A. Sinton and A. Cuevas, Appl. Phys. Lett., 69, 2510 (1996).
19. H. Nagel, C. Berge, and A. G. Aberle, J. Appl. Phys., 86, 6218 (1999).
20. D. E. Kane and R. M. Swanson, in The Eighteenth IEEE Photovoltaic Specialists Conference, p. 578 (1985).
21. N. J. Harrick, Internal Reflection Spectroscopy, Interscience, New York (1967).
22. W. A. Lanford and M. J. Rand, J. Appl. Phys., 49, 2473 (1978).
23. H. Jin, K. J. Weber, and A. W. Blakers, in The 15th International Photovoltaic Science and Engineering Conference, p. 30 (2005).
24. A. Stesmans and V. V. Afanas'ev, J. Vac. Sci. Technol. B, 16, 3108 (1998).
25. A. Stesmans, J. Appl. Phys., 92, 1317 (2002).
26. A. Stesmans, J. Appl. Phys., 88, 489 (2000).
27. A. Stesmans and V. V. Afanas'ev, Appl. Phys. Lett., 72, 2271 (1998).
28. M. A. Green, Silicon Solar Cells: Advanced Principles and Practice, Center for Photovoltaic Devices and Systems, Sydney, NSW, Australia (1995).