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Volumn 2, Issue , 2004, Pages 363-366
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Static and dynamic optical metrology of micro-mirror thermal deformation
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Author keywords
MOEMS; Optical profilometry; Optical switch; Stroboscopic interferometry; Thermo mechanical
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Indexed keywords
MOEMS;
OPTICAL PROFILOMETRY;
STROBOSCOPIC INTERFEROMETRY;
THERMO-MECHANICAL;
CHARGE COUPLED DEVICES;
COMPUTER SIMULATION;
DEFORMATION;
INTERFEROMETRY;
LIGHT EMITTING DIODES;
MICROELECTROMECHANICAL DEVICES;
OPTICAL SWITCHES;
PROFILOMETRY;
STROBOSCOPES;
THERMOMECHANICAL TREATMENT;
THIN FILMS;
MIRRORS;
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EID: 6344252968
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (2)
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References (3)
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