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Volumn 2, Issue , 2004, Pages 363-366

Static and dynamic optical metrology of micro-mirror thermal deformation

Author keywords

MOEMS; Optical profilometry; Optical switch; Stroboscopic interferometry; Thermo mechanical

Indexed keywords

MOEMS; OPTICAL PROFILOMETRY; STROBOSCOPIC INTERFEROMETRY; THERMO-MECHANICAL;

EID: 6344252968     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (2)

References (3)
  • 2
    • 6344262601 scopus 로고    scopus 로고
    • Investigating the thermal response of a micro-optical shutter
    • C.C. Wong, S. Graham, "Investigating the Thermal Response of a Micro-Optical Shutter," IEEE/ASME Itherm2002 (2002)
    • (2002) IEEE/ASME Itherm2002
    • Wong, C.C.1    Graham, S.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.