Experimental and computational study on laser heating of surface micromachined cantilevers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6111, Issue , 2006, Pages

  Phinney, Leslie M ^a   Spahn, Olga Blum ^a   Wong, C Channy ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Laser damage of MEMS; MOEMS; Optical MEMS; Polycrystalline silicon

Indexed keywords

LASER DAMAGE OF MEMS; MOEMS; OPTICAL MEMS;

COMPUTER SIMULATION; INTERFEROMETERS; LASER DAMAGE; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYSILICON;

CANTILEVER BEAMS;

EID: 33646041624     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.647487     Document Type: Conference Paper

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