Simultaneous measurement method of total and self-interference for the volumetric thickness-profilometer

Optics Express

Volumn 17, Issue 3, 2009, Pages 1352-1360

  You, Jang Woo ^a   Kim, Daesuk ^b   Ryu, Sung Yoon ^a   Kim, Soohyun ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Chonbuk National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION; EFFICIENCY; MICROMACHINING; OPTICAL INSTRUMENTS; POLARIZATION; PRISMS; SPECTROSCOPY; THIN FILMS;

ACOUSTO-OPTIC INTERACTION; ACOUSTO-OPTIC TUNABLE FILTERS; CALIBRATION PROCEDURE; COMMERCIAL EQUIPMENT; HIGH SPEED MEASUREMENTS; POLARIZATION SENSITIVE; SIMULTANEOUS MEASUREMENT; WAVELENGTH SCANNING;

FILM THICKNESS;

EID: 59749105192     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.17.001352     Document Type: Article

References (13)

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