Investigation of diode parameters using I-V and C-V characteristics of In/SiO2/p-Si (MIS) Schottky diodes

Physica B: Condensed Matter

Volumn 403, Issue 17, 2008, Pages 2690-2697

  Yüksel, Ö F ^a   Selcuk A B ^b   Ocak, S B ^b  

^a SELCUK UNIVERSITY   (Turkey)

^b NONE   (Turkey)

Author keywords

C V; Frequency dependence; I V; Insulator layer; Interface state density; MIS Schottky diodes; Series resistance

Indexed keywords

CAPACITANCE; DIODES; SCHOTTKY BARRIER DIODES; SILICON COMPOUNDS; SWITCHING CIRCUITS;

C-V; FREQUENCY DEPENDENCE; I-V; INSULATOR LAYER; INTERFACE STATE DENSITY; MIS SCHOTTKY DIODES; SERIES RESISTANCE;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 59049101533     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2008.01.039     Document Type: Article

References (36)

1. Sze S.M. Physics of Semiconductor Devices. second ed. (1981), Wiley, New York
2. Rhoderick E.H., and Williams R.H. Metal-Semiconductor Contacts (1988), Clarendon Press, Oxford
3. Acar S., Karadeniz S., Tuǧluoǧlu N., Selçuk A.B., and Kasap M. Appl. Surf. Sci. 233 (2004) 373
4. Ayyildiz E., Nuhoǧlu C., and Türüt A. J. Electron. Mater. 31 (2002) 119
5. Nicollian E.H., and Goetzberger A. Appl. Phys. Lett. 7 (1965) 216
6. Cowley A.M., and Sze S.M. J. Appl. Phys. 36 (1965) 3212
7. Nicollian E.H., and Goetzberger A. Bell Syst. Technol. J. 46 (1967) 1055
8. Card H.C., and Rhoderick E.H. J. Phys. D 4 (1971) 1589
9. Castagné R., and Vapaille A. Surf. Sci. 28 (1971) 157
10. Nicollian E.H., and Brews J.R. MOS Physics and Technology (1982), Wiley, New York
11. Singh A. Solid-State Electron. 28 (1985) 233
12. Werner J.H. Appl. Phys. A 47 (1988) 291
13. Cova P., and Singh A. Solid-State Electron. 33 (1990) 11
14. Chattopadhyay P., and Daw A.N. Solid-State Electron. 29 5 (1986) 555
15. Chattopadhyay P., and Raychaudhuri B. Solid-State Electron. 35 (1992) 875
16. Chattopadhyay P., and Raychaudhuri B. Solid-State Electron. 35 (1992) 1023
17. Chattopadhyay P., and Raychaudhuri B. Solid-State Electron. 36 (1993) 605
18. Türüt A., Yalçi{dotless}n N., and Saǧlam M. Solid-State Electron. 35 (1992) 835
19. Karadeniz S., Tuǧluoǧlu N., and Serin T. Appl. Surf. Sci. 233 (2004) 5
20. Karadeniz S., Tuǧluoǧlu N., Serin T., and Serin N. Appl. Surf. Sci. 246 (2005) 30
21. Hill W.A., and Coleman C.C. Solid-State Electron. 23 (1980) 987
22. Evangelou E.K., Konofaos N., Craven M.R., Cranton W.M., and Thomas C.B. Appl. Surf. Sci. 166 (2000) 504
23. Konofaos N. Microelectron. J. 35 (2004) 421
24. Dakhel A.A. Thin Solid Films 496 (2006) 353
25. Cheung S.K., and Cheung N.W. Appl. Phys. Lett. 49 (1986) 85
26. Tuǧluoǧlu N., Karadeniz S., Şahin M., and Şafak H. Appl. Surf. Sci. 233 (2004) 320
27. Tuǧluoǧlu N., Karadeniz S., and Alti{dotless}ndal S. Appl. Surf. Sci. 239 (2005) 481
28. Ayyildiz E., Türüt A., Efeoǧlu H., Tüzemen S., Saǧlam M., and Yoǧurtçu Y.K. Solid-State Electron. 39 (1996) 83
29. Fonash S.F.J. J. Appl. Phys. 54 (1983) 1966
30. Türüt A., and Saǧlam M. Physica B 179 (1992) 285
31. Szatkowski J., and Sieranski K. Solid-State Electron. 35 (1992) 1013
32. Türüt A., Saǧlam M., Efeoǧlu H., Yalçi{dotless}n N., Yi{dotless}ldi{dotless}ri{dotless}m M., and Abay B. Physica B 205 (1995) 41
33. Çetinkara H.A., Türüt A., Zengin D.M., and Erel S. Appl. Surf. Sci. 207 (2003) 190
34. Hanselaer P.L., Laflére W.H., van Meirhaeghe R.L., and Cardon F. J. Appl. Phys. 56 (1984) 2309
35. Akkal B., Benamara Z., Boudissa A., Bouiadjra N.B., Amrani M., Bideux L., and Gruzza B. Mater. Sci. Eng. B 55 (1988) 162
36. Akkal B., Benamara Z., Gruzza B., and Bideux L. Vacuum 57 (2000) 219