Electromechanical properties of microcantilever actuated by enhanced piezoelectric PZT thick film

Chinese Physics Letters

Volumn 25, Issue 11, 2008, Pages 4128-4130

  Liu, Hong Mei ^a,c   Zhao, Quan Liang ^b   Cao, Mao Sheng ^a,b   Yuan, Jie ^a   Duan, Zhong Xia ^d   Qiu, Cheng Jun ^b,c  

^a HARBIN ENGINEERING UNIVERSITY   (China)

^b BEIJING INSTITUTE OF TECHNOLOGY   (China)

^c HEILONGJIANG UNIVERSITY   (China)

^d MINZU UNIVERSITY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; NATURAL FREQUENCIES; SOL-GEL PROCESS; SOL-GELS; THICK FILMS; THIN FILMS;

BULK PZT; D 33; ELECTROMECHANICAL PROPERTY; MICRO-CANTILEVERS; PIEZOELECTRIC; PIEZOELECTRIC COEFFICIENT; PZT FILM; PZT THICK FILMS; PZT THIN-FILM; SOL- GEL METHODS;

PIEZOELECTRICITY;

EID: 58449130198     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/25/11/079     Document Type: Article

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