Design of microgyroscope with PZT thin film for actuating and sensing

Yadian Yu Shengguang/Piezoelectrics and Acoustooptics

Volumn 23, Issue 1, 2001, Pages 18-

  Ma, W ^a   Li, S W ^a   Yu, J L ^a  

^a NONE

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EID: 0035243492     PISSN: 10042474     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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