Fabrication of piezoelectric cantilever beam based on nanostructured PZT film

Key Engineering Materials

Volumn 368-372 PART 1, Issue , 2008, Pages 223-225

  Liu, Hongmei ^a,b   Zhao, Quanliang ^b   Qiu, Chengjun ^a,b   Cao, Maosheng ^b  

^a HEILONGJIANG UNIVERSITY   (China)

^b BEIJING INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Cantilever beam; PZT; Sol gel; Thick film

Indexed keywords

CANTILEVER BEAMS; NANOSTRUCTURES; PIEZOELECTRIC DEVICES; POLARIZATION; SOL-GEL PROCESS;

NANOSTRUCTURED PZT FILMS; PIEZOELECTRIC CANTILEVER BEAMS;

THICK FILMS;

EID: 40949093100     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/0-87849-473-1.223     Document Type: Conference Paper

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