Preparation of PZT(53/47) thick films deposited by a dip-coating process

Microelectronic Engineering

Volumn 66, Issue 1-4, 2003, Pages 865-871

  He, Xi Yun ^a   Ding, Ai Li ^a   Zheng, Xin Sen ^a   Qiu, Ping Sun ^a   Luo, Wei Gen ^a  

^a SHANGHAI INSTITUTE OF CERAMICS   (China)

Author keywords

Dip coating process; PZT thick films; Substrate characteristics

Indexed keywords

FERROELECTRICITY; LEAD COMPOUNDS; MICROSTRUCTURE; MORPHOLOGY; PIEZOELECTRICITY;

DIP-COATING PROCESS;

THICK FILMS;

EID: 0037391789     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)01013-4     Document Type: Conference Paper

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