Achieving thin films with micro/nano-scale controllable morphology by glancing angle deposition technique

Chinese Physics Letters

Volumn 25, Issue 12, 2008, Pages 4368-4370

  Jiang, Shao Ji ^a   Wang, Chao Yi ^a   Tang, Ji Jia ^a   Hu, Lin Xin ^a  

^a SUN YAT SEN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION RATES; MORPHOLOGY; PHYSICAL VAPOR DEPOSITION; ROTATION RATE;

CONTROLLABLE MORPHOLOGY; GLANCING ANGLE DEPOSITION TECHNIQUE; INCIDENT ANGLES; MICRO-NANO SCALE; NANOMETRES; PHYSICAL VAPOUR DEPOSITION; ROTATION RATE; SUBSTRATE ROTATION; THIN-FILMS; VAPOR-DEPOSITION TECHNIQUES;

THIN FILMS;

EID: 58449096202     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/25/12/051     Document Type: Article

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