Column angle variations in porous chevron thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 20, Issue 6, 2002, Pages 2062-2067

  Harris, K D ^a   Vick, D ^a   Smy, T ^b   Brett, M J ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

^b CARLETON UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DEPOSITION; GROWTH (MATERIALS); MICROSTRUCTURE; OPTICAL COATINGS; POROUS MATERIALS;

CHEVRON THIN FILMS;

THIN FILMS;

EID: 0036865313     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1517258     Document Type: Article

References (21)

1. T. Motohiro and Y. Taga, Appl. Opt. 28, 2466 (1989).
2. K. Robbie, L.J. Friedrich, S.K. Dew, T. Smy, and M.J. Brett, J. Vac. Sci. Technol. A 13, 1032 (1995).
3. K. Robbie and M.J. Brett, J. Vac. Sci. Technol. A 15, 1460 (1997).
4. K. Robbie, J.C. Sit, and M.J. Brett, J. Vac. sci. Technol. B 16, 1115 (1998).
5. R. Messier, V.C. Venugopal, and P.D. Sunal, J. Vac. Sci. Technol. A 18, 1538 (2000).
6. T.G. Knorr and R.W. Hoffman, Phys. Rev. 113, 1039 (1959).
7. L. Abelmann, P. ten Berge, J.C. Lodder, and T.J.A. Popma, J. Magn. Soc. Jpn. 18, 295 (1994).
8. K. Hara, J. Sci. Hiroshima Univ., Ser. A-2 34, 139 (1970).
9. M. Kamiya, K. Hara, K. Itoh, K. Okamoto, T. Hashimoto, and H. Fujiwara, J. Magn. Magn. Mater. 117, 232 (1992).
10. M. Kamiya, K. Hara, T. Hashimoto, K. Okamoto, and H. Fujiwara, J. Phys. Soc. Jpn. 52, 3585 (1983).
11. J.M. Nieuwenhuizen and H.B. Haanstra, Philips Tech. Rev. 27, 87 (1966).
12. R.N. Tait, T. Smy, and M.J. Brett, Thin Solid Films 226, 196 (1993).
13. L. Abelmann and C. Lodder, Thin Solid Films 305, 1 (1997).
14. A. van der Drift, Philips Res. Rep. 22, 267 (1967).
15. N.G. Nakhodin and A.I. Shaldervan, Thin Solid Films 10, 109 (1972).
16. M. Sikkens, I.J. Hodgkinson, F. Horowitz, H.A. Macleod, and J.J. Wharton, Opt. Eng. 25, 142 (1986).
17. M.J. Brett, J. Vac. Sci. Technol. A 6, 1749 (1988).
18. I. Hodgkinson and A. Laktakia, Opt. Eng. (Bellingham) 37, 3268 (1998).
19. W.W. Mullins, J. Appl. Phys. 28, 333 (1957).
20. L.J. Friedrich, S.K. Dew, M.J. Brett, and T. Smy, IEEE Trans. Semicond. Manuf. 12, 353 (1999).
21. T. Smy, D. Vick, M.J. Brett, S.K. Dew, A.T. Wu, J.C. Sit, and K.D. Harris, J. Vac. Sci. Technol. A 18, 2507 (2000).