Structure evolution and mechanical properties enhancement of Al/AlN multilayer

Applied Surface Science

Volumn 253, Issue 22, 2007, Pages 8835-8840

  Zhang, G A ^a   Wu, Z G ^a,b   Wang, M X ^a   Fan, X Y ^a   Wang, J ^a   Yan, P X ^a,c  

^a LANZHOU UNIVERSITY   (China)

^b GANSU UNIVERSITY OF TECHNOLOGY   (China)

^c LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

Author keywords

Al AlN multilayer; Hardness; Magnetron sputtering; Structure; Wear properties

Indexed keywords

ALUMINUM COMPOUNDS; CRYSTALLIZATION; MAGNETRON SPUTTERING; PHASE STRUCTURE; X RAY DIFFRACTION;

AL/ALN MULTILAYERS; LAYERED STRUCTURE; MULTILAYER MODULATION STRUCTURES; WEAR PROPERTIES;

MULTILAYERS;

EID: 34547827985     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.04.039     Document Type: Article

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