Spectroscopy infrared characterization of annealed silicon rich oxide films

2nd International Conference on Electrical and Electronics Engineering, ICEEE and XI Conference on Electrical Engineering, CIE 2005

Volumn 2005, Issue , 2005, Pages 435-439

  Luna Lopez A ^a   Aceves Mijares, M ^a   Malik, A ^a  

^a INSTITUTO NACIONAL DE ASTROFÍSICA   (Mexico)

Author keywords

Refractive index; Silicon rich oxide; Spectroscopy infrared

Indexed keywords

ABSORPTION SPECTRA; REACTIVE GASES; SILICON RICH OXIDE (SRO); THERMAL OXIDE;

ANNEALING; DEPOSITION; ELECTRIC PROPERTIES; INFRARED SPECTROSCOPY; OPTICAL PROPERTIES; OPTOELECTRONIC DEVICES; PHOTOLUMINESCENCE; REFRACTIVE INDEX; SEMICONDUCTING SILICON; SPECTRUM ANALYSIS;

SEMICONDUCTING FILMS;

EID: 33748891778     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICEEE.2005.1529663     Document Type: Conference Paper

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