Metallic thin-film thermocouple for thermoelectric microgenerators

Sensors and Actuators, A: Physical

Volumn 60, Issue 1-3, 1997, Pages 65-67

  Castaño, Enrique ^a   Revuelto, Eva ^a   Martín, Mari Carmen ^a   García Alonso, Andres ^a   Gracia, F Javier ^a  

^a CEIT   (Spain)

Author keywords

Thermoelectric microgenerators; Thin film thermocouples

Indexed keywords

DIRECT ENERGY CONVERTERS; ELECTRIC CONDUCTIVITY; METALLIC FILMS; MULTILAYERS; THERMOELECTRIC EQUIPMENT; THERMOELECTRICITY; THIN FILMS;

NICKEL CHROMIUM ALLOYS; SEEBECK COEFFICIENT; SEEBECK EFFECT; THERMOELECTRIC MICROGENERATORS; THIN FILM THERMOCOUPLE;

THERMOCOUPLES;

EID: 0031141923     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(96)01435-5     Document Type: Article

References (6)

1. F. Völklein and H. Baltes, Optimization tools for the performance parameters of thermoelectric microsensors, Sensors and Actuators A, 36 (1993) 65.
2. T. Elbel, R. Lenggenhager and H. Baltes, Model of thermoelectric radiation sensors made by CMOS and micromachining, Sensors and Actuators A, 35 (1992) 101.
3. A.W. van Herwaarden, D.C. van Duyn and J. Groeneweg, Small-size vacuum sensors based on silicon thermopiles, Sensors and Actuators A, 25 (1991) 565.
4. H. Baltes, D. Moser and F. Völklein, Thermoelectric microsensors and microsystems, in W. Göpel, J. Hesse and J.N. Zemel (eds.), Sensors, Vol. 7, VCH, Weinheim, 1990, pp. 13-57.
5. T. Elbel, Miniaturized thermoelectric radiation sensors, Sensors Mater., 3 (1991) 97.
6. D. Moser, CMOS flow sensors, Ph.D. Thesis, Swiss Federal Institute of Technology (ETH), Zurich (1993).