Sloping profile and pattern transfer to silicon by shape-controllable 3-D lithography and ICP

Sensors and Actuators, A: Physical

Volumn 139, Issue 1-2 SPEC. ISS., 2007, Pages 281-286

  Jeon, Jin Wan ^a   Yoon, Jun Bo ^a   Lim, Koeng Su ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

3 D lithography; 3 D silicon microstructure; Inductively coupled plasma (ICP); Pattern transfer; Polymer dispersed liquid crystal (PDLC)

Indexed keywords

INDUCTIVELY COUPLED PLASMA; LIQUID CRYSTALS; LITHOGRAPHY; MICROFABRICATION; MICROSTRUCTURE; PHOTORESISTS; THREE DIMENSIONAL;

PATTERN TRANSFER; POLYMER DISPERSED LIQUID CRYSTAL (PDLC); SILICON MICROSTRUCTURE;

SILICON;

EID: 34548177340     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.11.015     Document Type: Article

References (10)

1. Schwartz B., and Robbins H. Chemical etching of silicon. J. Electrochem. Soc. 123 (1976) 1903-1909
2. Shikida M., Tokoro K., Uchikawa D., and Sato K. Surface morphology of anisotropically etched single-crystal silicon. J. Micromech. Microeng. 10 (2000) 522-527
3. Chou T.-K.A., and Najafi K. Fabrication of out-of-plane curved surfaces in Si by utilizing RIE lag. Proceedings of the IEEE Inf. Conf. on Micro Electro Mechanical Systems (MEMS) (2002) 145-148
4. Waits C.M., Modafe A., and Ghodssi R. Investigation of gray-scale technology for large area 3D silicon MEMS structures. J. Micromech. Microeng. 13 (2003) 170-177
5. Fletcher D.A., Crozier K.B., Guarini K.W., Minne S.C., Kino G.S., Quate C.F., and Goodson K.E. Microfabricated silicon solid immersion lens. J. Microelectromech. Syst. 10 (2001) 450-459
6. Bourouina T., Masuzawa T., and Fujita H. The MEMSNAS process: microloading effect for micromachining 3-D structures of nearly all shapes. J. Microelectromech. Syst. 13 (2004) 190-199
7. Larsen K.P., Rankilde J.T., and Hansen O. Investigations of the isotropic etch of an ICP source for silicon microlens mold fabrication. J. Micromech. Microeng. 15 (2005) 873-882
8. Rotich S.K., Smith J.G., Evans A.G.R., and Brunnschweiler A. Micromachined thin solar cells with a novel light trapping scheme. J. Micromech. Microeng. 8 (1998) 134-137
9. Zhao J., Wang A., Campbell P., and Green M.A. A 19.8% efficient honeycomb multicrystalline silicon solar cell with improved light trapping. IEEE T. Electron. Dev. 46 (1999) 1978-1983
10. J.-W. Jeon, J.-Y. Choi, J.-B. Yoon, K.S. Lim, in: Proceedings of the IEEE Inf. Conf. on Micro Electro Mechanical Systems (MEMS), 2006. pp. 110-113.