Microelectromechanical tunneling sensor fabrication and post-processing characterization using focused ion beams

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 4, 1998, Pages 2449-2454

  Stratton, F P ^a   Kubena, R L ^a   McNulty, H H ^a   Joyce, R J ^a   Vajo, J ^a  

^a Hughes Aircraft Co   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008438534     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590189     Document Type: Article

References (4)

1. G. M. Atkinson, F. P. Stratton, and R. L. Kubena, J. Vac. Sci. Technol. B 10, 3104 (1992).
2. G. M. Atkinson, R. L. Kubena, L. E. Larson, L. D. Nguyen. F. P. Stratton, L. M. Jelloian, M. V. Le, and H. Mcnulty, J. Vac. Sci. Technol. B 9, 3506 (1991).
3. R. L. Kubena, G. M. Atkinson, W. P. Robinson, and F. P. Stratton, J. Vac. Sci. Technol. B 14, 4029 (1996).
4. R. L. Kubena, G. M. Atkinson, W. P. Robinson, and F. P. Stratton, J. Vac. Sci. Technol. B 14, 4030 (1996).