Annealing effects on the bonding structures, optical and mechanical properties for radio frequency reactive sputtered germanium carbide films

Applied Surface Science

Volumn 255, Issue 6, 2009, Pages 3552-3557

  Hu, C Q ^a,b   Zhu, J Q ^a   Zheng, W T ^b   Han, J C ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b Department of Materials Science   (China)

Author keywords

Annealing; Bonding structure; Germanium carbide films; Optical and mechanical properties

Indexed keywords

ANNEALING; CARBIDES; GERMANIUM COMPOUNDS; HYDROGEN BONDS; II-VI SEMICONDUCTORS; LIGHT TRANSMISSION; MECHANICAL PROPERTIES; RADIO WAVES; REACTIVE SPUTTERING; REFRACTIVE INDEX; SULFUR COMPOUNDS; TANTALUM; THIN FILMS; ZINC SULFIDE;

ANNEALING EFFECTS; BONDING STRUCTURE; DOUBLE-LAYER FILMS; GERMANIUM CARBIDE; MIXTURE DISCHARGES; OPTICAL AND MECHANICAL PROPERTIES; RADIO FREQUENCIES; THERMAL-ANNEALING;

OPTICAL FILMS;

EID: 58049204308     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.08.115     Document Type: Article

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