Thin films of amorphous germanium-carbon alloy prepared by radio-frequency magnetron sputtering

Journal of the Electrochemical Society

Volumn 143, Issue 12, 1996, Pages 4087-4089

  Maruyama, Toshiro ^a,b   Akagi, Hisao ^a  

^a KYOTO UNIVERSITY   (Japan)

^b ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS ALLOYS; BINDING ENERGY; CHEMICAL BONDS; ENERGY GAP; FILM PREPARATION; GERMANIUM ALLOYS; MAGNETRON SPUTTERING; SPUTTER DEPOSITION; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS GERMANIUM CARBON ALLOY; RADIOFREQUENCY MAGNETRON SPUTTERING;

SEMICONDUCTING FILMS;

EID: 0030402663     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837340     Document Type: Article

References (7)

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