Ge 1-x C x double-layer antireflection and protection coatings

Applied Surface Science

Volumn 252, Issue 23, 2006, Pages 8135-8138

  Hu, C Q ^a   Zheng, W T ^a   Li, J J ^a   Jiang, Q ^a   Tian, H W ^a   Lu, X Y ^a   Liu, J W ^a   Xu, L ^a   Wang, J B ^a  

^a Jilin University   (China)

Author keywords

Antireflection and protection coatings; Ge 1 x C x films; RF reactive sputtering; Zinc sulphide

Indexed keywords

GERMANIUM COMPOUNDS; INFRARED SPECTROSCOPY; PROTECTIVE COATINGS; SUBSTRATES; THIN FILMS; ZINC SULFIDE;

ANTIREFLECTION AND PROTECTION COATINGS; GE1-XCX FILMS; INFRARED WINDOW; RF REACTIVE SPUTTERING;

ANTIREFLECTION COATINGS;

EID: 33748325760     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.10.035     Document Type: Article

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