The influence of deposition and annealing temperatures on structure and properties of zirconium oxide

ECS Transactions

Volumn 2, Issue 7, 2006, Pages 79-88

  Silinskas, M ^a   Lisker, M ^a   Matichyn, S ^a   Burte, E P ^a  

^a OTTO VON GUERICKE UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; ELECTRODEPOSITION; GROWTH RATE; PERMITTIVITY; RAPID THERMAL ANNEALING; THIN FILMS;

CUBIC ORIENTATION; DEPOSITION TEMPERATURE; TETRAGONAL PHASES;

ZIRCONIA;

EID: 40249110412     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2408905     Document Type: Conference Paper

References (11)