Controller design of a MEMS gyro-accelerometer with a single proof mass

International Journal of Control, Automation and Systems

Volumn 6, Issue 6, 2008, Pages 873-883

  Sung, Woon Tahk ^a   Kang, Taesam ^b   Lee, Jang Gyu ^c  

^a SAMSUNG Electronics   (South Korea)

^b Konkuk University   (South Korea)

^c Seoul National University   (South Korea)

Author keywords

Accelerometer; Gyro accelerometer; Gyroscope; MEMS; PID control

Indexed keywords

ACCELEROMETERS; CONTROL THEORY; DESIGN; MEMS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; PROPORTIONAL CONTROL SYSTEMS;

CONTROL LOOPS; CONTROLLER DESIGN METHODS; CONTROLLER DESIGNS; DESIGN SCHEMES; GYRO-ACCELEROMETER; MEMS GYROS; PARAMETER VARIATIONS; PARAMETRIC STUDIES; PERFORMANCE ROBUSTNESSES; PID CONTROL; PROOF MASSES; QUALITY FACTORS; RESONANT FREQUENCIES; ROBUST PERFORMANCES; SIMULATION RESULTS; STABILITY MARGINS;

GYROSCOPES;

EID: 57549100009     PISSN: 15986446     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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