Design and performance test of a MEMS vibratory gyroscope with a novel AGC force rebalance control

Journal of Micromechanics and Microengineering

Volumn 17, Issue 10, 2007, Pages 1939-1948

  Sung, Woon Tahk ^a   Sung, Sangkyung ^b   Lee, Jang Gyu ^a   Kang, Taesam ^b  

^a Seoul National University   (South Korea)

^b Konkuk University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; BANDWIDTH; GAIN CONTROL; MEMS; VIBRATION ANALYSIS; WAFER BONDING;

AUTOMATIC GAIN CONTROL (AGC); REBALANCE CONTROL STRATEGY; RESONANCE-BASED SENSORS; VIBRATORY GYROSCOPES;

GYROSCOPES;

EID: 34748831862     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/10/003     Document Type: Article

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