Development of a bulk-micromachined single crystal silicon gyroscope of wide operating range at atmospheric pressure

Key Engineering Materials

Volumn 306-308 II, Issue , 2006, Pages 1259-1264

  Sung, Woon Tahk ^a   Kim, Seong Hyok ^b   Lee, Jang Gyu ^a   Kang, Taesam ^c  

^a Seoul National University   (South Korea)

^b LG Electronics Inc   (South Korea)

^c Konkuk University   (South Korea)

Author keywords

Bulk micromachining; Gyroscope; Inertial sensors; MEMS

Indexed keywords

ATMOSPHERIC PRESSURE; MICROMACHINING; SILICON; SINGLE CRYSTALS;

BULK MICROMACHINING; INERTIAL SENSORS; MEMS;

GYROSCOPES;

EID: 33644855418     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/0-87849-989-x.1259     Document Type: Conference Paper

References (6)

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2. Woon Tahk Sung, Jin Woo Song, Sangkyung Sung, Jang Gyu Lee and Taesam Kang: Feedback loop design for micro gyroscope, Proceedings of ICCAS2002, (2002),pp. 234-238
3. Hyung-Taek Lim, Jin-Woo Song, Jang-Gyu Lee and Yong-Kweon Kim: A Few deg/hr resolvable low noise lateral microgyroscope: IEEE MEMS Conference, Las Vegas, NV, January 20-24, (2002), pp. 627-630
4. N. Yazdi, F. Ayazi and K. Najafi: Micromachined Inertial Sensors, Proceeding of the IEEE, vol. 86, No. 8, (August 1998), pp. 1640-1659
5. th IEEE Micro Electro Mechanical Systems Conference (MEMS 2002), Las Vegas, Nevada, (January 2002).
6. G. He, and K. Najafi: A Single-Crystal Silicon Vibrating Ring Gyroscope, Technical Digest, IEEE 2002 Int. Conference on Micro Electro Mechanical Systems (MEMS 2002), Las Vegas, (January 2002)