-
1
-
-
16244377507
-
Development of an electrostatically actuated MEMS switching probe card
-
T. Itoh, S. Kawamura, T. Suga, and K. Kataoka, "Development of an electrostatically actuated MEMS switching probe card," in Proc. 50th IEEE Holm Conf. Elect. Contacts 22nd Int. Conf. Elect. Contacts, 2004, pp. 226-230.
-
(2004)
Proc. 50th IEEE Holm Conf. Elect. Contacts 22nd Int. Conf. Elect. Contacts
, pp. 226-230
-
-
Itoh, T.1
Kawamura, S.2
Suga, T.3
Kataoka, K.4
-
2
-
-
0142153665
-
Low contact-force fritting probe card using buckling microcantilevers
-
K. Kataoka, T. Itoh, and T. Suga, "Low contact-force fritting probe card using buckling microcantilevers," in Proc. Int. Test Conf., 2003, pp. 1008-1008.
-
(2003)
Proc. Int. Test Conf
, pp. 1008-1008
-
-
Kataoka, K.1
Itoh, T.2
Suga, T.3
-
3
-
-
33744513154
-
Six-gigahertz equivalent circuit model of an RF membrane probe card
-
Jun
-
S. A. Wartenberg, "Six-gigahertz equivalent circuit model of an RF membrane probe card," IEEE Trans. Instrum. Meas., vol. 55, no. 3, pp. 989-994, Jun. 2006.
-
(2006)
IEEE Trans. Instrum. Meas
, vol.55
, Issue.3
, pp. 989-994
-
-
Wartenberg, S.A.1
-
4
-
-
0029250073
-
A micromachined array probe card - Fabrication process
-
Feb
-
M. Beiley, J. Leung, and S. S. Wong, "A micromachined array probe card - Fabrication process," IEEE Trans. Compon. Packag. Manuf. Technol. B, vol. 18, no. 1, pp. 179-183, Feb. 1995.
-
(1995)
IEEE Trans. Compon. Packag. Manuf. Technol. B
, vol.18
, Issue.1
, pp. 179-183
-
-
Beiley, M.1
Leung, J.2
Wong, S.S.3
-
5
-
-
0028272767
-
Silicon microprobing array of testing and burn-in
-
T. Hirano, A. Kimura, and S. Mori, "Silicon microprobing array of testing and burn-in," in Proc. Multi-Chip Module Conf., 1994, pp. 89-94.
-
(1994)
Proc. Multi-Chip Module Conf
, pp. 89-94
-
-
Hirano, T.1
Kimura, A.2
Mori, S.3
-
6
-
-
16244383245
-
Contact properties of Ni micro-springs for MEMS probe card
-
K. Kataoka, T. Itoh, T. Suga, and K. Inoue, "Contact properties of Ni micro-springs for MEMS probe card," in Proc. 50th IEEE Holm Conf. Elect. Contacts 22nd Int. Conf. Elect. Contacts, 2004, pp. 231-235.
-
(2004)
Proc. 50th IEEE Holm Conf. Elect. Contacts 22nd Int. Conf. Elect. Contacts
, pp. 231-235
-
-
Kataoka, K.1
Itoh, T.2
Suga, T.3
Inoue, K.4
-
7
-
-
33750128413
-
An experimental and numerical investigation into multilayer probe card layout design
-
Jul
-
D. S. Liu and M. K. Shih, "An experimental and numerical investigation into multilayer probe card layout design," IEEE Trans. Electron. Packag. Manuf., vol. 29, no. 3, pp. 163-171, Jul. 2006.
-
(2006)
IEEE Trans. Electron. Packag. Manuf
, vol.29
, Issue.3
, pp. 163-171
-
-
Liu, D.S.1
Shih, M.K.2
-
8
-
-
3042826630
-
Multi-layer electroplated micro-spring array for MEMS probe card
-
K. Kataoka, T. Itoh, K. Inoue, and T. Suga, "Multi-layer electroplated micro-spring array for MEMS probe card," in Proc. 17th IEEE Int. Conf. Micro Electro Mechanical Syst. (MEMS), 2004, pp. 733-736.
-
(2004)
Proc. 17th IEEE Int. Conf. Micro Electro Mechanical Syst. (MEMS)
, pp. 733-736
-
-
Kataoka, K.1
Itoh, T.2
Inoue, K.3
Suga, T.4
-
10
-
-
0142196115
-
Thermal solutions for discrete and wafer-level RF MEMS switch packages
-
Aug
-
L. L. Mercado, T.-Y. T. Lee, S.-M. Kuo, V. Hause, and C. Amrine, "Thermal solutions for discrete and wafer-level RF MEMS switch packages," IEEE Trans. Adv. Packag., vol. 26, no. 3, pp. 318-326, Aug. 2003.
-
(2003)
IEEE Trans. Adv. Packag
, vol.26
, Issue.3
, pp. 318-326
-
-
Mercado, L.L.1
Lee, T.-Y.T.2
Kuo, S.-M.3
Hause, V.4
Amrine, C.5
-
11
-
-
0033319678
-
Contact physics of gold microcontacts for MEMS switches
-
Sep
-
D. Hyman and M. Mehregany, "Contact physics of gold microcontacts for MEMS switches," IEEE Trans. Compon. Packag. Technol., vol. 22, no. 3, pp. 357-364, Sep. 1999.
-
(1999)
IEEE Trans. Compon. Packag. Technol
, vol.22
, Issue.3
, pp. 357-364
-
-
Hyman, D.1
Mehregany, M.2
-
12
-
-
27644524028
-
Laterally moving bistable MEMS DC switch for biomedical applications
-
Oct
-
R. A. M. Receveur, C. R. Marxer, R. Woering, V. C. M. H. Larik, and N.-F. d. Rooij, "Laterally moving bistable MEMS DC switch for biomedical applications," J. Microelectromechanical Syst., vol. 14, pp. 1089-1098, Oct. 2005.
-
(2005)
J. Microelectromechanical Syst
, vol.14
, pp. 1089-1098
-
-
Receveur, R.A.M.1
Marxer, C.R.2
Woering, R.3
Larik, V.C.M.H.4
Rooij, N.-F.D.5
-
13
-
-
21244464351
-
Multiwalled carbon nanotube/nanofiber arrays as conductive and dry adhesive interface materials
-
Pasadena, CA, Sep
-
T. Tong, Y. Zhao, L. Delzeit, A. Kashani, and A. Majumdar, "Multiwalled carbon nanotube/nanofiber arrays as conductive and dry adhesive interface materials," in Proc. ASME NANO2004, Pasadena, CA, Sep. 2004, pp. 1-6.
-
(2004)
Proc. ASME NANO2004
, pp. 1-6
-
-
Tong, T.1
Zhao, Y.2
Delzeit, L.3
Kashani, A.4
Majumdar, A.5
-
14
-
-
9644272358
-
Dimensional errors in LIGA-produced metal parts due to thermal expansion and swelling of PMMA
-
Monterey, CA, Jun
-
S. K. Griffiths and J. A. A. Crowell, "Dimensional errors in LIGA-produced metal parts due to thermal expansion and swelling of PMMA," in Proc. 5th Int. Conf. High Aspect Ratio Microstructure Technol. (HARMST '03), Monterey, CA, Jun. 2003, pp. 1548-1557.
-
(2003)
Proc. 5th Int. Conf. High Aspect Ratio Microstructure Technol. (HARMST '03)
, pp. 1548-1557
-
-
Griffiths, S.K.1
Crowell, J.A.A.2
-
15
-
-
0036643564
-
High aspect ratio patterning with a proximity ultraviolet source
-
P. M. Dentinger, K. L. Krafcik, K. L. Simison, R. P. Janek, and J. Hachman, "High aspect ratio patterning with a proximity ultraviolet source," Microelectron. Eng., vol. 61-62, pp. 1001-1007, 2002.
-
(2002)
Microelectron. Eng
, vol.61-62
, pp. 1001-1007
-
-
Dentinger, P.M.1
Krafcik, K.L.2
Simison, K.L.3
Janek, R.P.4
Hachman, J.5
-
16
-
-
66349136858
-
High aspect ratio metal MEMS (LIGA) technologies for rugged, low-cost firetrain and control components
-
Apr, Tech. Rep
-
J. Rasmussen, W. Bonivert, and J. Krafcik, "High aspect ratio metal MEMS (LIGA) technologies for rugged, low-cost firetrain and control components," in Proc. NDIA 47th Annu. Fuze Conf., Apr. 2003, Tech. Rep..
-
(2003)
Proc. NDIA 47th Annu. Fuze Conf
-
-
Rasmussen, J.1
Bonivert, W.2
Krafcik, J.3
-
17
-
-
0141522752
-
Electrical contact resistance theory for conductive rough surfaces
-
Sep
-
L. Kogut and K. Komvopoulos, "Electrical contact resistance theory for conductive rough surfaces," J. Appl. Phys., vol. 94, no. 5, pp. 3153-3162, Sep. 2003.
-
(2003)
J. Appl. Phys
, vol.94
, Issue.5
, pp. 3153-3162
-
-
Kogut, L.1
Komvopoulos, K.2
-
18
-
-
0033300168
-
Size-dependent electrical constriction resistance for contacts of arbitrary size: From Sharvin to Holm limits
-
A. Mikrajuddin, F. G. Shi, H. Kim, and K. Okuyama, "Size-dependent electrical constriction resistance for contacts of arbitrary size: From Sharvin to Holm limits," in Proc. Mater. Sci. Semicond. Process., 1999, pp. 321-327.
-
(1999)
Proc. Mater. Sci. Semicond. Process
, pp. 321-327
-
-
Mikrajuddin, A.1
Shi, F.G.2
Kim, H.3
Okuyama, K.4
-
20
-
-
28644450171
-
Attachment of fiber array adhesive through side contact
-
C. Majidi, R. Groff, and R. Fearing, "Attachment of fiber array adhesive through side contact," J. Appl. Phys., vol. 98, 2005, 103521.
-
(2005)
J. Appl. Phys
, vol.98
, pp. 103521
-
-
Majidi, C.1
Groff, R.2
Fearing, R.3
-
22
-
-
33747691700
-
High friction from a stiff polymer using micro-fiber arrays
-
C. Majidi, R. Groff, Y. Maeno, B. Schubert, S. Baek, B. Bush, R. Maboudian, N. Gravish, M. Wilkinson, and K. A. Fearing, "High friction from a stiff polymer using micro-fiber arrays," Phys. Rev. Lett., vol. 97, 2006, 076103,.
-
(2006)
Phys. Rev. Lett
, vol.97
, pp. 076103
-
-
Majidi, C.1
Groff, R.2
Maeno, Y.3
Schubert, B.4
Baek, S.5
Bush, B.6
Maboudian, R.7
Gravish, N.8
Wilkinson, M.9
Fearing, K.A.10
-
23
-
-
37649001368
-
-
G. A. DiBari, Metal Finishing. New York: Elsevier, 2003, 105, ch. Nickel Plating, pp. 224-241.
-
G. A. DiBari, Metal Finishing. New York: Elsevier, 2003, vol. 105, ch. Nickel Plating, pp. 224-241.
-
-
-
-
24
-
-
50449088033
-
Ni electroforming of large-area micro metal molds
-
Nov
-
T. Kimura, K. Yamashita, T. K. K.Teppei, K. Idei, and T. Hattori, "Ni electroforming of large-area micro metal molds," in Proc. Int. Symp. Micro-NanoMechatronics Human Sci., Nov. 2006, pp. 1-5.
-
(2006)
Proc. Int. Symp. Micro-NanoMechatronics Human Sci
, pp. 1-5
-
-
Kimura, T.1
Yamashita, K.2
Teppei, T.K.K.3
Idei, K.4
Hattori, T.5
-
25
-
-
0742320701
-
Electrical contact resistance theory for conductive rough surfaces separated by a thin insulating film
-
Jan
-
L. Kogut and K. Komvopoulos, "Electrical contact resistance theory for conductive rough surfaces separated by a thin insulating film," J. Appl. Phys., vol. 95, no. 2, pp. 576-585, Jan. 2004.
-
(2004)
J. Appl. Phys
, vol.95
, Issue.2
, pp. 576-585
-
-
Kogut, L.1
Komvopoulos, K.2
-
26
-
-
9144258943
-
Generalized formula for the electrical tunnel effect between similar electodes separated by a thin insulating film
-
Jun
-
J. Simmons, "Generalized formula for the electrical tunnel effect between similar electodes separated by a thin insulating film," J. Appl. Phys., vol. 34, no. 6, pp. 1793-1803, Jun. 1963.
-
(1963)
J. Appl. Phys
, vol.34
, Issue.6
, pp. 1793-1803
-
-
Simmons, J.1
-
27
-
-
0020734969
-
Photoresponse characteristics of thin-film nickel-nickel oxide-nickel tunneling juctions
-
Apr
-
R. G. Marshalek and F. M. Davidson, "Photoresponse characteristics of thin-film nickel-nickel oxide-nickel tunneling juctions," IEEE J. Quantum Electron., vol. 19, no. 4, pp. 743-754, Apr. 1983.
-
(1983)
IEEE J. Quantum Electron
, vol.19
, Issue.4
, pp. 743-754
-
-
Marshalek, R.G.1
Davidson, F.M.2
-
28
-
-
33749551787
-
Dielectric properties of cobalt oxide, nickel oxide, and their mixed crystals
-
Jun
-
K. V. Rao and A. Smakula, "Dielectric properties of cobalt oxide, nickel oxide, and their mixed crystals," J. Appl. Phys., vol. 36, no. 6, pp. 2031-2035, Jun. 1965.
-
(1965)
J. Appl. Phys
, vol.36
, Issue.6
, pp. 2031-2035
-
-
Rao, K.V.1
Smakula, A.2
-
29
-
-
84906702532
-
-
λ-radiation dosimetry using screen printed nickel oxide thick films
-
K. Arshak, O. Korostynska, and J. Harris, " λ-radiation dosimetry using screen printed nickel oxide thick films," in Proc. 23 Int. Conf. Microelectron., 2002, pp. 357-360.
-
(2002)
Proc. 23 Int. Conf. Microelectron
, pp. 357-360
-
-
Arshak, K.1
Korostynska, O.2
Harris, J.3
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