Dimensional errors in LIGA-produced metal structures due to thermal expansion and swelling of PMMA

Journal of Micromechanics and Microengineering

Volumn 14, Issue 11, 2004, Pages 1548-1557

  Griffiths, S K ^a   Crowell, J A W ^a   Kistler, B L ^a   Dryden, A S ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODEPOSITION; ELECTROLYTES; ERRORS; HYDROPHOBICITY; METALS; SWELLING; THERMAL EXPANSION; X RAY LITHOGRAPHY;

DIMENSIONAL ERRORS; ELASTIC DISPLACEMENTS; LINEAR STRUCTURES; THERMAL STRAIN;

POLYMETHYL METHACRYLATES;

EID: 9644272358     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/11/017     Document Type: Article

References (24)

1. Becker E W, Ehrfeld W, Hagmann P, Maner A and Munchmeyer D 1986 Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming and plastic moulding (LIGA process) J. Microelectron. Eng. 4 35-56
2. Munchmeyer D and Ehrfeld W 1987 Accuracy limits and potential applications of the LIGA technique in integrated optics Proc. SPIE 803 72-9
3. Ehrfeld W, Bley P, Gotz F, Mohr J, Munchmeyer D, Schelb W, Baving H J and Beets D 1988 Progress in deep-etch synchrotron radiation lithography J. Vac. Sci. Technol. B 6 178-82
4. Feiertag G, Ehrfeld W, Lehr H, Schmidt A and Schmidt M 1997 Accuracy of structure transfer in deep x-ray lithography J. Microelectron. Eng. 35 557-60
5. Feiertag G, Ehrfeld W, Lehr H, Schmidt A and Schmidt M 1998 Calculation and experimental determination of the structure transfer accuracy in deep x-ray lithography J. Micromech. Microeng. 7 323-31
6. Pantenburg F J and Mohr J 1995 Influence of secondary effects on the structure quality in deep x-ray lithographie Nucl. Instrum. Methods B 97 551-6
7. Pantenburg F J, Achenbach S and Mohr J 1998 Characterization of defects in very high deep-etch x-ray lithography microstructures Microsyst. Technol. 4 89-93
8. Griffiths S K and Ting A 2002 The influence of x-ray fluorescence on LIGA sidewall tolerances Microsyst. Technol. 8 120-8
9. Zumaque H, Kohring G A and Hormes J 1997 Simulation studies of energy deposition and secondary processes in deep x-ray lithography J. Micromech. Microeng. 7 79-88
10. Griffiths S K 2004 Fundamental limitations of LIGA x-ray lithography: sidewall offset, slope and minimum feature size J. Micromech. Microeng. 14 999-1011
11. Achenbach S, Pantenburg F J and Mohr J 2003 Numerical simulation of thermal distortions in deep and ultra-deep x-ray lithography Microsyst. Technol. 9 220-4
12. Ruzzu A and Matthis B 2002 Swelling of PMMA structures in aqueous solutions and room temperature Ni-electroforming Microsyst. Technol. 8 116-9
13. Griffiths S K and Crowell JAW 2003 Dimensional errors in LIGA-produced metal parts due to thermal expansion and swelling of PMMA Proc. 5th Int. Workshop on High Aspect Ratio Microstructure Technology (HARMST' 03) pp 15-7
14. Aigeldinger G, Ceremuga J T and Skala D M 2004 Large batch dimensional metrology demonstrated in the example of a LIGA fabricated spring Microsyst. Technol. accepted
15. Daniels C A 1989 Polymers: Structure and Properties (Lancaster, PA: Technomic Publishing)
16. Goods S H, Watson R M and Yi M 2003 Thermal expansion and hydration behavior of PMMA molding materials for LIGA applications Sandia National Laboratories Report SAND2003-8000
17. ABAQUS/Standard v6.3. ABAQUS, Inc. Pawtucket, RI
18. Product specification for CQ grade PMMA. Goodfellow Corp. Berwyn, PA
19. 2 protective coatings on polycarbonate Fresenius J. Anal. Chem. 358 242-4
20. Schulz U and Kaiser N 1997 Near-infrared spectroscopy for monitoring water permeability of optical coatings on plastic Appl. Opt. 36 862-5
21. Mohr J, Ehrfeld W and Munchmeyer D 1988 Requirements of resist layers in deep-etch synchrotron radiation lithography J. Vac. Sci. Technol. E 6 2264-7
22. Pantenburg F J, Achenbach S and Mohr J 1998 Influence of developer temperature and resist material on the structure quality in deep x-ray lithography J. Vac. Sci. Technol. B 16 3547-51
23. Guerin L, Bossel M, Demierre M, Calmes S and Renaud P 1997 Simple and low cost fabrication of embedded microchannels by using a new thick-film photoplastic Proc. Transducers 1419-22
24. Wollersheim O, Zumaque H, Hormes J, Langen J, Hoessel P, Haussling L and Hoffmann G 1994 Radiation chemistry of poly(lactides) as new polymer resists for the LIGA process J. Micromech. Microeng. 4 84-93