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Volumn 29, Issue 3, 2006, Pages 163-171

An experimental and numerical investigation into multilayer probe card layout design

Author keywords

Finite element method (FEM); Microforce tests; Multilayer needle card; Wafer probing test

Indexed keywords

COMPUTATIONAL METHODS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; INTEGRATED CIRCUITS; MATHEMATICAL MODELS; MULTILAYERS; SILICON WAFERS;

EID: 33750128413     PISSN: 1521334X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TEPM.2006.881764     Document Type: Article
Times cited : (15)

References (9)
  • 2
    • 0030414890 scopus 로고    scopus 로고
    • "Impact of wafer probe damage on flip chip yields and reliability"
    • M. J. Varnau, "Impact of wafer probe damage on flip chip yields and reliability," in Proc. IEEE/CPMT-IEMT, 1996, pp. 293-297.
    • (1996) Proc. IEEE/CPMT-IEMT , pp. 293-297
    • Varnau, M.J.1
  • 3
    • 0033350892 scopus 로고    scopus 로고
    • "Reliability evaluation of probe-before-bump technology"
    • Q. Tan, C. Beddingfield, and A. Mistry, "Reliability evaluation of probe-before-bump technology," in Proc. IEEE/CPMT-IEMT, 1999, pp. 320-324.
    • (1999) Proc. IEEE/CPMT-IEMT , pp. 320-324
    • Tan, Q.1    Beddingfield, C.2    Mistry, A.3
  • 6
    • 0033335961 scopus 로고    scopus 로고
    • "Probe contact resistance variations during elevated temperature wafer test"
    • J. J. Broz and R. M. Rincon, "Probe contact resistance variations during elevated temperature wafer test," in Proc. IEEE-ITC, 1999, pp. 396-405.
    • (1999) Proc. IEEE-ITC , pp. 396-405
    • Broz, J.J.1    Rincon, R.M.2
  • 8
    • 0028733372 scopus 로고
    • "Mechanical behavior of aluminum and copper thin films"
    • D. T. Read and J. W. Dally, "Mechanical behavior of aluminum and copper thin films," in Proc. ASME-IMECE, 1994, pp. 41-49.
    • (1994) Proc. ASME-IMECE , pp. 41-49
    • Read, D.T.1    Dally, J.W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.