Single-angle-of-incidence ellipsometry

Applied Optics

Volumn 47, Issue 25, 2008, Pages 4579-4588

  Zaghloul, Y A ^a   Zaghloul, A R M ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b ITR Technologies Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; ERROR ANALYSIS; ERRORS; GENETIC ALGORITHMS; INVERSE PROBLEMS; OPTICAL CONSTANTS; POPULATION STATISTICS; RANDOM ERRORS; SUBSTRATES; SYSTEMATIC ERRORS;

ABSORBING SUBSTRATES; COMPUTATIONAL EFFORT; ELLIPSOMETRIC FUNCTION; EXPERIMENTAL ERRORS; FILM-SUBSTRATE SYSTEMS; PATENT APPLICATIONS; REAL-TIME APPLICATION; SINGLE ANGLE OF INCIDENCE ELLIPSOMETRY;

OPTICAL FILMS;

EID: 57049180662     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.47.004579     Document Type: Article

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39. These values are chosen so that the results could be compared with those of [15].