Thickness and refractivity computation in ellipsometry measurement by genetic algorithm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4077, Issue , 2000, Pages 492-495

  Peng, Zilong ^a   Li, Zuoyi ^a   Hu, Yu ^a   Tang, Liguo ^a   Yang, Xiaofei ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CONVERGENCE OF NUMERICAL METHODS; GENETIC ALGORITHMS; REFRACTIVE INDEX; THICKNESS MEASUREMENT;

ELLIPSOMETRY MEASUREMENT;

ELLIPSOMETRY;

EID: 0033689532     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)