SCOPUS 정보 검색 플랫폼

Volumn 313-314, Issue , 1998, Pages 1-9

Spectroscopic ellipsometry: A historical overview

a PENNSYLVANIA STATE UNIVERSITY (United States)

Author keywords

Characterization of surfaces, interfaces; Dielectric functions; Multilayer structures; Non destructive; Real time monitoring and control; Spectroscopic ellipsometry; Thin films

Indexed keywords

ATOMIC FORCE MICROSCOPY; ENERGY GAP; INTERFACES (MATERIALS); MULTILAYERS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SURFACE ROUGHNESS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

DIELECTRIC FUNCTIONS; SPECTROSCOPIC ELLIPSOMETRY (SE);

ELLIPSOMETRY;

EID: 0032001218 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)00762-1 Document Type: Article

Times cited : (170)

References (59)

1
- 0347228384
- P. Drude, Ann. Phys. 32 (1887) 584.
- (1887) Ann. Phys. , vol.32 , pp. 584
- Drude, P.¹

2
- 0347228387
- P. Drude, Ann. Phys. 34 (1888) 489.
- (1888) Ann. Phys. , vol.34 , pp. 489
- Drude, P.¹

3
- 0000007492
- P. Drude, Ann. Phys. 36 (1889) 532.
- (1889) Ann. Phys. , vol.36 , pp. 532
- Drude, P.¹

4
- 0009860305
- P. Drude, Ann. Phys. 36 (1889) 865.
- (1889) Ann. Phys. , vol.36 , pp. 865
- Drude, P.¹

5
- 0001762384
- P. Drude, Ann. Phys. 39 (1890) 481.
- (1890) Ann. Phys. , vol.39 , pp. 481
- Drude, P.¹

6
- 0004040706
- Academic Press, New York
- E.D. Palik (Ed.) Handbook of Optical Constants, Academic Press, New York, Vol. 1, 1985; Vol. 2, 1991.
- (1985) Handbook of Optical Constants , vol.1
- Palik, E.D.¹

7
- 0345967218
- E.D. Palik (Ed.) Handbook of Optical Constants, Academic Press, New York, Vol. 1, 1985; Vol. 2, 1991.
- (1991) Handbook of Optical Constants , vol.2

8
- 0347228388
- L. Tronstad, Trans. Faraday Soc. 29 (1933) 502.
- (1933) Trans. Faraday Soc. , vol.29 , pp. 502
- Tronstad, L.¹

9
- 0002661264
- A. Rothen, Rev. Sci. Instrum. 16 (1945) 26.
- (1945) Rev. Sci. Instrum. , vol.16 , pp. 26
- Rothen, A.¹

10
- 49649159509
- W. Paik, J. O'M. Bockris, Surf. Sci. 28 (1971) 61.
- (1971) Surf. Sci. , vol.28 , pp. 61
- Paik, W.¹ Bockris, J.O'M.²

11
- 0346598540
- R.H. Muller, Surf. Sci. 56 (1976) 19.
- (1976) Surf. Sci. , vol.56 , pp. 19
- Muller, R.H.¹

12
- 0003808259
- North Holland, Amsterdam
- R.M.A. Azzam, N.M. Bashara, Ellipsometry and Polarized Light, North Holland, Amsterdam, 1977.
- (1977) Ellipsometry and Polarized Light
- Azzam, R.M.A.¹ Bashara, N.M.²

13
- 49149140093
- P.S. Hauge, Surf. Sci. 96 (1980) 108.
- (1980) Surf. Sci. , vol.96 , pp. 108
- Hauge, P.S.¹

14
- 0020994875
- D.E. Aspnes, J. Phys. (Paris) Colloq. C10 (1983) 3.
- (1983) J. Phys. (Paris) Colloq. , vol.C10 , pp. 3
- Aspnes, D.E.¹

15
- 0000869688
- Y.T. Kim, R.W. Collins, K. Vedam, Surf. Sci. 233 (1990) 341.
- (1990) Surf. Sci. , vol.233 , pp. 341
- Kim, Y.T.¹ Collins, R.W.² Vedam, K.³

16
- 0001583920
- R.W. Collins, Rev. Sci. Instrum. 61 (1990) 2029.
- (1990) Rev. Sci. Instrum. , vol.61 , pp. 2029
- Collins, R.W.¹

17
- 0002957706
- E.D. Palik (Ed.), Academic Press, New York
- J. Barth, R.L. Johnson, M. Cardona, in: E.D. Palik (Ed.), Handbook of Optical Constants, Academic Press, New York, Vol. 2, 1991, p. 213.
- (1991) Handbook of Optical Constants , vol.2 , pp. 213
- Barth, J.¹ Johnson, R.L.² Cardona, M.³

18
- 0347858595
- Akademie-Verlag, Berlin
- A. Roeseler, Infrared Ellipsometry, Akademie-Verlag, Berlin, 1990.
- (1990) Infrared Ellipsometry
- Roeseler, A.¹

19
- 0016425448
- D.E. Aspnes, A.A. Studna, Appl. Opt. 14 (1975) 220.
- (1975) Appl. Opt. , vol.14 , pp. 220
- Aspnes, D.E.¹ Studna, A.A.²

20
- 0017939517
- D.E. Aspnes, A.A. Studna, Rev. Sci. Instrum. 49 (1978) 291.
- (1978) Rev. Sci. Instrum. , vol.49 , pp. 291
- Aspnes, D.E.¹ Studna, A.A.²

21
- 35949035159
- D.E. Aspnes, J.B. Theeten, F. Hottier, Phys. Rev. B 20 (1979) 3292.
- (1979) Phys. Rev. B , vol.20 , pp. 3292
- Aspnes, D.E.¹ Theeten, J.B.² Hottier, F.³

22
- 0019648336
- D.E. Aspnes, Proc. Soc. Photo-Opt. Instrum. Eng. 276 (1981) 188.
- (1981) Proc. Soc. Photo-Opt. Instrum. Eng. , vol.276 , pp. 188
- Aspnes, D.E.¹

23
- 84980703555
- Leipzig
- D.A.G. Bruggeman, Ann. Phys. (Leipzig) 24 (1935) 636.
- (1935) Ann. Phys. , vol.24 , pp. 636
- Bruggeman, D.A.G.¹

24
- 84975655373
- G.E. Jellison, Jr., Appl. Opt. 30 (1991) 3354.
- (1991) Appl. Opt. , vol.30 , pp. 3354
- Jellison G.E., Jr.¹

25
- 0027682165
- G.E. Jellison, Jr., Thin Solid Films 234 (1993) 416.
- (1993) Thin Solid Films , vol.234 , pp. 416
- Jellison G.E., Jr.¹

26
- 0019058474
- D.E. Aspnes, J. Vac. Sci. Technol. 17 (1980) 1057.
- (1980) J. Vac. Sci. Technol. , vol.17 , pp. 1057
- Aspnes, D.E.¹

27
- 24244452897
- D.E. Aspnes, A.A. Studna, Appl. Phys. Lett. 39 (1981) 316.
- (1981) Appl. Phys. Lett. , vol.39 , pp. 316
- Aspnes, D.E.¹ Studna, A.A.²

28
- 33847596250
- D.E. Aspnes, A.A. Studna, Phys. Rev. B 27 (1983) 985.
- (1983) Phys. Rev. B , vol.27 , pp. 985
- Aspnes, D.E.¹ Studna, A.A.²

29
- 0347228385
- in press
- K.A. Bell, L. Mantese, U. Rossow, D.E. Aspnes, J. Vac. Sci. Technol. (in press, 1997).
- (1997) J. Vac. Sci. Technol.
- Bell, K.A.¹ Mantese, L.² Rossow, U.³ Aspnes, D.E.⁴

30
- 35949022079
- L. Vina, M. Cardona, Phys. Rev. B 34 (1986) 2586.
- (1986) Phys. Rev. B , vol.34 , pp. 2586
- Vina, L.¹ Cardona, M.²

31
- 0142166825
- P. Lautenschlager, M. Garriga, L. Vina, M. Cardona, Phys. Rev. B 36 (1987) 4821.
- (1987) Phys. Rev. B , vol.36 , pp. 4821
- Lautenschlager, P.¹ Garriga, M.² Vina, L.³ Cardona, M.⁴

32
- 36549094998
- D.E. Aspnes, S.M. Kelso, R.A. Logan, R. Bhat, J. Appl. Phys. 60 (1986) 754.
- (1986) J. Appl. Phys. , vol.60 , pp. 754
- Aspnes, D.E.¹ Kelso, S.M.² Logan, R.A.³ Bhat, R.⁴

33
- 0001148919
- K. Vedam, P.J. McMarr, J. Narayan, Appl. Phys. Lett. 51 (1985) 339.
- (1985) Appl. Phys. Lett. , vol.51 , pp. 339
- Vedam, K.¹ McMarr, P.J.² Narayan, J.³

34
- 0022665008
- P.J. McMarr, K. Vedam, J. Narayan, J. Appl. Phys. 59 (1986) 694.
- (1986) J. Appl. Phys. , vol.59 , pp. 694
- McMarr, P.J.¹ Vedam, K.² Narayan, J.³

35
- 0026712657
- T. Lohner, W. Skorupa, M. Fried, K. Vedam, N. Nguyen, R. Grotzschel, H. Bartsch, J. Gyulai, Mater. Sci. Eng. B12 (1992) 177.
- (1992) Mater. Sci. Eng. , vol.B12 , pp. 177
- Lohner, T.¹ Skorupa, W.² Fried, M.³ Vedam, K.⁴ Nguyen, N.⁵ Grotzschel, R.⁶ Bartsch, H.⁷ Gyulai, J.⁸

36
- 0030211909
- J. Koh, Y. Lu, C.R. Wronski, Y. Kuang, R.W. Collins, T.T. Tsong, Y.E. Strausser, Appl. Phys. Lett. 69 (1996) 1297.
- (1996) Appl. Phys. Lett. , vol.69 , pp. 1297
- Koh, J.¹ Lu, Y.² Wronski, C.R.³ Kuang, Y.⁴ Collins, R.W.⁵ Tsong, T.T.⁶ Strausser, Y.E.⁷

37
- 36549101680
- O.W. Holland, C.W. White, D. Fathy, Appl. Phys. Lett. 51 (1987) 520.
- (1987) Appl. Phys. Lett. , vol.51 , pp. 520
- Holland, O.W.¹ White, C.W.² Fathy, D.³

38
- 36549097679
- O.W. Holland, C.W. White, D. Fathy, Appl. Phys. Lett. 51 (1987) 1337.
- (1987) Appl. Phys. Lett. , vol.51 , pp. 1337
- Holland, O.W.¹ White, C.W.² Fathy, D.³

39
- 0000053072
- A.R. Srivatsa, S. Sharan, O.W. Holland, J. Narayan, J. Appl. Phys. 65 (1989) 4028.
- (1989) J. Appl. Phys. , vol.65 , pp. 4028
- Srivatsa, A.R.¹ Sharan, S.² Holland, O.W.³ Narayan, J.⁴

40
- 0012779391
- N.V. Nguyen, K. Vedam, J. Narayan, J. Appl. Phys. 67 (1990) 599.
- (1990) J. Appl. Phys. , vol.67 , pp. 599
- Nguyen, N.V.¹ Vedam, K.² Narayan, J.³

41
- 21544466317
- J. Humlicek, M. Garriga, M.I. Alonsos, M. Cardona, J. Appl. Phys. 65 (1989) 2827.
- (1989) J. Appl. Phys. , vol.65 , pp. 2827
- Humlicek, J.¹ Garriga, M.² Alonsos, M.I.³ Cardona, M.⁴

42
- 0000294541
- K. Vedam (Ed.), Academic Press, New York
- P. Chindaudom, K. Vedam, in: K. Vedam (Ed.), Physics of Thin Films, Academic Press, New York, Vol. 19, 1994, p. 191.
- (1994) Physics of Thin Films , vol.19 , pp. 191
- Chindaudom, P.¹ Vedam, K.²

43
- 0021386613
- R.H. Muller, J.C. Farmer, Rev. Sci. Instrum. 55 (1984) 371.
- (1984) Rev. Sci. Instrum. , vol.55 , pp. 371
- Muller, R.H.¹ Farmer, J.C.²

44
- 0000414636
- I. An, H.V. Nguyen, A.R. Heyd, R.W. Collins, Rev. Sci. Instrum. 65 (1994) 3489.
- (1994) Rev. Sci. Instrum. , vol.65 , pp. 3489
- An, I.¹ Nguyen, H.V.² Heyd, A.R.³ Collins, R.W.⁴

45
- 0041542479
- Academic Press, New York
- F. Abeles, Physics of Thin Films, Academic Press, New York, Vol. 6, 1971, p. 151.
- (1971) Physics of Thin Films , vol.6 , pp. 151
- Abeles, F.¹

46
- 0000733820
- H.V. Nguyen, I. An, R.W. Collins, Phys. Rev. Lett. 68 (1992) 994.
- (1992) Phys. Rev. Lett. , vol.68 , pp. 994
- Nguyen, H.V.¹ An, I.² Collins, R.W.³

47
- 25544432648
- H.V. Nguyen, I. An, R.W. Collins, Phys. Rev. B 47 (1993) 3947.
- (1993) Phys. Rev. B , vol.47 , pp. 3947
- Nguyen, H.V.¹ An, I.² Collins, R.W.³

48
- 21844492840
- M. Wakagi, B. Hong, H.V. Nguyen, R.W. Collins, W. Drawl, R. Messier, J. Vac. Sci. Technol. A13 (1995) 1917.
- (1995) J. Vac. Sci. Technol. , vol.A13 , pp. 1917
- Wakagi, M.¹ Hong, B.² Nguyen, H.V.³ Collins, R.W.⁴ Drawl, W.⁵ Messier, R.⁶

49
- 0003937834
- J. Lee, R.W. Collins, R. Messier, Y.E. Strauser, Appl. Phys. Lett. 70 (1997) 1527.
- (1997) Appl. Phys. Lett. , vol.70 , pp. 1527
- Lee, J.¹ Collins, R.W.² Messier, R.³ Strauser, Y.E.⁴

50
- 0026255823
- Y.T. Kim, R.W. Collins, K. Vedam, D.L. Allara, J. Electrochem. Soc. 138 (1991) 3266.
- (1991) J. Electrochem. Soc. , vol.138 , pp. 3266
- Kim, Y.T.¹ Collins, R.W.² Vedam, K.³ Allara, D.L.⁴

51
- 34249997393
- H.S. Witham, P. Chindaudom, I. An, R.W. Collins, R. Messier, K. Vedam, J. Vac. Sci. Technol. A11 (1993) 1881.
- (1993) J. Vac. Sci. Technol. , vol.A11 , pp. 1881
- Witham, H.S.¹ Chindaudom, P.² An, I.³ Collins, R.W.⁴ Messier, R.⁵ Vedam, K.⁶

52
- 0029387485
- J. Koh, Y. Lu, S. Kim, J.S. Burnham, C.R. Wronski, R.W. Collins, Appl. Phys. Lett. 67 (1995) 2669.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 2669
- Koh, J.¹ Lu, Y.² Kim, S.³ Burnham, J.S.⁴ Wronski, C.R.⁵ Collins, R.W.⁶

53
- 0029410219
- S. Kim, R.W. Collins, Appl. Phys. Lett. 67 (1995) 3010.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 3010
- Kim, S.¹ Collins, R.W.²

54
- 0005309697
- S. Kim, J.S. Burnham, J. Koh, L. Jiao, C.R. Wronski, R.W. Collins, J. Appl. Phys. 80 (1996) 2420.
- (1996) J. Appl. Phys. , vol.80 , pp. 2420
- Kim, S.¹ Burnham, J.S.² Koh, J.³ Jiao, L.⁴ Wronski, C.R.⁵ Collins, R.W.⁶

55
- 21544439456
- D.E. Aspnes, J. Opt. Soc. Am. A10 (1993) 974.
- (1993) J. Opt. Soc. Am. , vol.A10 , pp. 974
- Aspnes, D.E.¹

56
- 36449000302
- D.E. Aspnes, W.E. Quinn, M.C. Tamargo, M.A.A. Pudensi, S.A. Schwartz, M.J.S.P. Brasil, R.E. Nahory, S. Gregory, Appl. Phys. Lett. 60 (1992) 1244.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 1244
- Aspnes, D.E.¹ Quinn, W.E.² Tamargo, M.C.³ Pudensi, M.A.A.⁴ Schwartz, S.A.⁵ Brasil, M.J.S.P.⁶ Nahory, R.E.⁷ Gregory, S.⁸

57
- 0345967214
- Thin Solid Films
- H. Fujiwara, J. Koh, C.R. Wronski, R.W. Collins, Proceedings of the ICSE-2 Conference, Thin Solid Films (1998) [this volume].
- (1998) Proceedings of the ICSE-2 Conference , vol.THIS VOLUME
- Fujiwara, H.¹ Koh, J.² Wronski, C.R.³ Collins, R.W.⁴

58
- 0031997438
- F. Kong, R. Kostecki, F. McLarnon, R.H. Muller, Thin Solid Films 313-314 (1998) 775.
- (1998) Thin Solid Films , vol.313-314 , pp. 775
- Kong, F.¹ Kostecki, R.² McLarnon, F.³ Muller, R.H.⁴

59
- 0032000421
- H. Arwin, Thin Solid Films 313-314 (1998) 764.
- (1998) Thin Solid Films , vol.313-314 , pp. 764
- Arwin, H.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.