SCOPUS 정보 검색 플랫폼

Volumn 313-314, Issue , 1998, Pages 1-9

Spectroscopic ellipsometry: A historical overview

a PENNSYLVANIA STATE UNIVERSITY (United States)

Author keywords

Characterization of surfaces, interfaces; Dielectric functions; Multilayer structures; Non destructive; Real time monitoring and control; Spectroscopic ellipsometry; Thin films

Indexed keywords

ATOMIC FORCE MICROSCOPY; ENERGY GAP; INTERFACES (MATERIALS); MULTILAYERS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SURFACE ROUGHNESS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

DIELECTRIC FUNCTIONS; SPECTROSCOPIC ELLIPSOMETRY (SE);

ELLIPSOMETRY;

EID: 0032001218 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)00762-1 Document Type: Article

Times cited : (171)

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