Multi-domain genetic algorithm (MDGA) and its applications to thin film metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4779, Issue , 2002, Pages 132-138

  Leng, Jingmin ^a   Sidorowich, John ^a   Opsal, Jon ^a  

^a Therma Wave Inc   (United States)

Author keywords

Bottom anti reflective coating (BARC); Dispersion; Multi domain genetic algorithm (MDGA); Plasma treated Ti; Spectroscopic ellipsometry (SE); X ray reflectivity (XRR)

Indexed keywords

ANTIREFLECTION COATINGS; ELLIPSOMETRY; GENETIC ALGORITHMS; GLOBAL OPTIMIZATION; MATHEMATICAL MODELS; THIN FILMS;

BOTTOM ANTIREFLECTIVE COATING; MULTIPLE DOMAIN GENETIC ALGORITHM; SPECTROSCOPIC ELLIPSOMETRY; X RAY REFLECTIVITY;

OPTICAL FILMS;

EID: 0036987035     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.453733     Document Type: Conference Paper

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