Combined use of computational intelligence and materials data for on-line monitoring and control of MBE experiments

Engineering Applications of Artificial Intelligence

Volumn 11, Issue 5, 1998, Pages 587-595

  Meng, Zhuo ^a   Yang, Qian ^a   Yip, P C ^a   Eyink, K G ^b   Taferner, W T ^b   Igelnik, B ^c  

^a AI Ware Div Comp Assoc Intl I   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

^c CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

Ellipsometry; Guided evolutionary simulated annealing (GESA); Molecular beam epitaxy (MBE); Optimization; Process monitoring and control; Stochastic search

Indexed keywords

CONTROL SYSTEMS; GENETIC ALGORITHMS; MOLECULAR BEAM EPITAXY; MONITORING; ONLINE SYSTEMS; THIN FILMS;

ONLINE MONITORING;

ARTIFICIAL INTELLIGENCE;

EID: 0032182930     PISSN: 09521976     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0952-1976(98)00024-4     Document Type: Article

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