Genetic algorithm for ellipsometric data inversion of absorbing layers

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 17, Issue 1, 2000, Pages 129-134

  Cormier, Gabriel ^a   Boudreau, Roger ^a  

^a UNIVERSITÉ DE MONCTON   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHM; ARTICLE; COMPUTER SIMULATION; EVOLUTION; GENETICS; MUTATION; OPTICS;

ALGORITHMS; COMPUTER SIMULATION; EVOLUTION; GENETICS; MUTATION; OPTICS;

EID: 0033628459     PISSN: 10847529     EISSN: 15208532     Source Type: Journal    
DOI: 10.1364/JOSAA.17.000129     Document Type: Article

References (15)

1. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, New York, 1996).
2. F. L. McCrackin and J. P. Colson, “Computational techniques for the use of the exact Drude equations in reflection problems, ” in “Ellipsometry in the measurement of surfaces and films, ” Natl Bur. Stand. Misc. Publ. 256, 61-82 (1964).
3. A. R. Reinberg, “Ellipsometer data analysis with a small programmable desk calculator, ” Appl. Opt. 11, 1273-1274 (1972).
4. T. Easwarakhanthan, C. Michel, and S. Ravelet, “Numerical method for the ellipsometric determination of optical constants and thickness of thin films with microcomputers, ” Surf. Sci. 197, 339-345 (1988).
5. F. K. Urban, “Ellipsometry algorithm for absorbing films, ” Appl. Opt. 32, 2339-2344 (1993).
6. J.-P. Drolet, S. C. Russev, M. I. Boyanov, and R. Leblanc, “Polynomial inversion of the single transparent layer problem in ellipsometry, ” J. Opt. Soc. Am. A 11, 3284-3291 (1994).
7. G. E. Jellison, “Use of the biased estimator in the interpretation of spectroscopic ellipsometry data, ” Appl. Opt. 30, 3354-3360 (1991).
8. S. Bosch, F. Monzonís, and E. Masetti, “Ellipsometric methods for absorbing layers: A modified downhill simplex algorithm, ” Thin Solid Films 289, 54-58 (1996).
9. J. H. Holland, Adaptation in Natural and Artificial Systems (University of Michigan Press, Ann Arbor, Mich., 1975).
10. D. E. Goldberg, Genetic Algorithms in Search, Optimization and Machine Learning (Addison-Wesley, Reading, Mass., 1989).
11. T. Eisenhammer, M. Lazarov, M. Leutbecher, U. Schöffel, and R. Sizmann, “Optimization of interference filters with genetic algorithms applied to silver-based heat mirrors, ” Appl. Opt. 32, 6310-6315 (1993).
12. L. Davis, Handbook of Genetic Algorithms (Van Nostrand Reinhold, New York, 1991).
13. A. H. Wright, “Genetic algorithms for real parameter optimization, ” in Foundation of Genetic Algorithms, G. J. E. Rawlins, ed. (Morgan Kaufmann, San Mateo, Calif., 1991), pp. 205-218.
14. Z. Michalewicz, Genetic Algorithms (Springer-Verlag, New York, 1992).
15. S. Bosch, J. Perez, and A. Canillas, “Numerical algorithm for spectroscopic ellipsometry of thick transparent films, ” Appl. Opt. 37, 1177-1179 (1998).