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Volumn 255, Issue 5 PART 1, 2008, Pages 2370-2374
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Microstructure and properties of nanocrystalline titanium monoxide films synthesized by inductively coupled plasma assisted reactive direct current magnetron sputtering
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Author keywords
Crystallinity; Inductively coupled plasma; Magnetron sputtering; Titanium monoxide
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Indexed keywords
INDUCTIVELY COUPLED PLASMA;
MAGNETRON SPUTTERING;
NANOCRYSTALS;
OXIDE FILMS;
OXIDE MINERALS;
SCANNING ELECTRON MICROSCOPY;
SUBSTRATES;
TITANIUM DIOXIDE;
X RAY DIFFRACTION;
X RAY PHOTOELECTRON SPECTROSCOPY;
CRYSTALLINITIES;
DEGREE OF CRYSTALLINITY;
DIRECT CURRENT MAGNETRON SPUTTERING;
FIELD EMISSION SCANNING ELECTRON MICROSCOPES;
MICROSTRUCTURE AND PROPERTIES;
NANOCRYSTALLINE TITANIUMS;
TITANIUM DIOXIDE FILMS;
TITANIUM MONOXIDE;
TITANIUM OXIDES;
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EID: 56949094799
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2008.07.108 Document Type: Article |
Times cited : (20)
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References (18)
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