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Volumn 255, Issue 5 PART 1, 2008, Pages 2370-2374

Microstructure and properties of nanocrystalline titanium monoxide films synthesized by inductively coupled plasma assisted reactive direct current magnetron sputtering

Author keywords

Crystallinity; Inductively coupled plasma; Magnetron sputtering; Titanium monoxide

Indexed keywords

INDUCTIVELY COUPLED PLASMA; MAGNETRON SPUTTERING; NANOCRYSTALS; OXIDE FILMS; OXIDE MINERALS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; TITANIUM DIOXIDE; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 56949094799     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.07.108     Document Type: Article
Times cited : (20)

References (18)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.