SCOPUS 정보 검색 플랫폼

Vacuum

Volumn 58, Issue 2, 2000, Pages 327-334

Oxygen-ion-assisted deposition of TiO films

(1) Martev, I N a

a INSTITUTE OF ELECTRONICS (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AUGER ELECTRON SPECTROSCOPY; CRYSTAL STRUCTURE; CRYSTALLINE MATERIALS; FILM GROWTH; ION BEAMS; MICROELECTRONICS; PHASE COMPOSITION; THIN FILMS; TITANIUM OXIDES; VAPOR DEPOSITION; X RAY CRYSTALLOGRAPHY;

ANTIDIFFUSION EFFICIENCY; ION-ASSISTED PHYSICAL VAPOR DEPOSITION;

SEMICONDUCTING FILMS;

EID: 0034245859 PISSN: 0042207X EISSN: None Source Type: Journal
DOI: 10.1016/S0042-207X(00)00186-X Document Type: Article

Times cited : (40)

References (11)

1
- 0024106902
- Quenisset C., Naslain R., Demoncy P. Surf Interface Anal. 13:1988;130-134.
- (1988) Surf Interface Anal , vol.13 , pp. 130-134
- Quenisset, C.¹ Naslain, R.² Demoncy, P.³

2
- 0342546859
- Ameen M.S., Graettinger T.M., Rou S.H., Al-Shareef H.N., Gifford K.D., Auciello O., Kingon A.I. Mater Res Soc Symp Proc. 200:1990;65-69.
- (1990) Mater Res Soc Symp Proc , vol.200 , pp. 65-69
- Ameen, M.S.¹ Graettinger, T.M.² Rou, S.H.³ Al-Shareef, H.N.⁴ Gifford, K.D.⁵ Auciello, O.⁶ Kingon, A.I.⁷

3
- 21544439412
- Ramesh R., Chan W.K., Wilkens B., Gilchrist T., Sands T., Tarascon J.M., Keramidas V.G. Appl Phys Lett. 61:1992;1537-1539.
- (1992) Appl Phys Lett , vol.61 , pp. 1537-1539
- Ramesh, R.¹ Chan, W.K.² Wilkens, B.³ Gilchrist, T.⁴ Sands, T.⁵ Tarascon, J.M.⁶ Keramidas, V.G.⁷

4
- 0343852561
- Grigorov K.G., Stoyanova M., Martev I.N., Grigorov G.I. Bulg J Phys. 25:1998;177-180.
- (1998) Bulg J Phys , vol.25 , pp. 177-180
- Grigorov, K.G.¹ Stoyanova, M.² Martev, I.N.³ Grigorov, G.I.⁴

5
- 0343852562
- Grigorov K.G., Bouchier D., Stoyanova M., Grigorov G.I., Caudano R., Sporcen R. C R Acad Bulg Sci. 50:1997;29-32.
- (1997) C R Acad Bulg Sci , vol.50 , pp. 29-32
- Grigorov, K.G.¹ Bouchier, D.² Stoyanova, M.³ Grigorov, G.I.⁴ Caudano, R.⁵ Sporcen, R.⁶

6
- 0022794667
- Grigorov G.I., Martev I.N. Thin Solid Films. 143:1986;177-185.
- (1986) Thin Solid Films , vol.143 , pp. 177-185
- Grigorov, G.I.¹ Martev, I.N.²

7
- 0020720583
- Grigorov G.I., Tzatzov K.K. Vacuum. 33:1983;139-143.
- (1983) Vacuum , vol.33 , pp. 139-143
- Grigorov, G.I.¹ Tzatzov, K.K.²

8
- 0017517693
- Mathieu H.J., Mathieu J.B., McClure D.E., Landolt D. J Vac Sci Technol. 14:1977;1023-1028.
- (1977) J Vac Sci Technol , vol.14 , pp. 1023-1028
- Mathieu, H.J.¹ Mathieu, J.B.² McClure, D.E.³ Landolt, D.⁴

9
- 0000094824
- Solomon J.S., Baum W.L. Surf Sci. 51:1975;228-236.
- (1975) Surf Sci , vol.51 , pp. 228-236
- Solomon, J.S.¹ Baum, W.L.²

10
- 33750418518
- Fisher D.W. Phys Rev. B5:1972;4219-4227.
- (1972) Phys Rev , vol.5 , pp. 4219-4227
- Fisher, D.W.¹

11
- 0026120391
- Grigorov G.I., Martev I.M., Stoyanova M.V., Vignes J.-L., Langeron J.-P. Thin Solid Films. 198:1991;169-176.
- (1991) Thin Solid Films , vol.198 , pp. 169-176
- Grigorov, G.I.¹ Martev, I.M.² Stoyanova, M.V.³ Vignes, J.-L.⁴ Langeron, J.-P.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.