Microstructure and physical properties of DLC films deposited by laser induced high current pulsed arc deposition

Thin Solid Films

Volumn 517, Issue 3, 2008, Pages 1141-1145

  Wu, Jin Bao ^a   Chen, Chao Ying ^a   Shin, Chin Te ^a   Li, Mei Yi ^b   Leu, Ming Sheng ^a   Li, Ai Kang ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b NATIONAL NANO DEVICE LABORATORIES   (Taiwan)

Author keywords

Cathodic vacuum arc; Diamond like carbon; Laser induced high current pulsed arc

Indexed keywords

CAVITY RESONATORS; COATINGS; CORROSION; CORROSIVE EFFECTS; DIAMONDS; ELECTRIC LOAD MANAGEMENT; HARDNESS; INERT GAS WELDING; LASERS; PULSED LASER APPLICATIONS; SILICON; STEEL; STEEL CORROSION; STEEL METALLURGY; VACUUM APPLICATIONS; VACUUM TECHNOLOGY; WELDS;

ARC CURRENTS; CATHODIC VACUUM ARC; CORROSION BEHAVIORS; CORROSION CURRENTS; DENSER STRUCTURES; DIAMOND-LIKE CARBON; DIAMOND-LIKE CARBONS; DLC COATINGS; DLC FILMS; EXCELLENT CORROSIONS; HIGH CURRENTS; LASER INDUCED; LASER INDUCED HIGH CURRENT PULSED ARC; PULSED ARC DEPOSITIONS; PULSED ARCS; PULSED CURRENTS; SI(100); STEEL SUBSTRATES;

STAINLESS STEEL;

EID: 56649102195     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.08.150     Document Type: Article

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